JPS6223862B2 - - Google Patents
Info
- Publication number
- JPS6223862B2 JPS6223862B2 JP4449279A JP4449279A JPS6223862B2 JP S6223862 B2 JPS6223862 B2 JP S6223862B2 JP 4449279 A JP4449279 A JP 4449279A JP 4449279 A JP4449279 A JP 4449279A JP S6223862 B2 JPS6223862 B2 JP S6223862B2
- Authority
- JP
- Japan
- Prior art keywords
- chip
- pattern
- mask
- name
- scribe line
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000034 method Methods 0.000 claims description 12
- 238000004519 manufacturing process Methods 0.000 claims description 11
- 239000000758 substrate Substances 0.000 claims description 5
- 238000010586 diagram Methods 0.000 description 6
- 230000002093 peripheral effect Effects 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 3
- 230000010354 integration Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/38—Masks having auxiliary features, e.g. special coatings or marks for alignment or testing; Preparation thereof
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4449279A JPS55135837A (en) | 1979-04-12 | 1979-04-12 | Manufacture of photomask |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4449279A JPS55135837A (en) | 1979-04-12 | 1979-04-12 | Manufacture of photomask |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS55135837A JPS55135837A (en) | 1980-10-23 |
JPS6223862B2 true JPS6223862B2 (de) | 1987-05-26 |
Family
ID=12693043
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4449279A Granted JPS55135837A (en) | 1979-04-12 | 1979-04-12 | Manufacture of photomask |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS55135837A (de) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02133949A (ja) * | 1988-11-14 | 1990-05-23 | Hitachi Cable Ltd | リードフレームのスポットめっき方法 |
JPH0734930Y2 (ja) * | 1990-06-26 | 1995-08-09 | 富士プラント工業株式会社 | アイランド部にもメッキが必要なリードフレーム用の部分メッキ用マスク材 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0277744A (ja) * | 1988-09-13 | 1990-03-16 | Fujitsu Ltd | フォトマスクの製造方法 |
JP3638778B2 (ja) | 1997-03-31 | 2005-04-13 | 株式会社ルネサステクノロジ | 半導体集積回路装置およびその製造方法 |
JP4014708B2 (ja) | 1997-08-21 | 2007-11-28 | 株式会社ルネサステクノロジ | 半導体集積回路装置の設計方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5311958B2 (de) * | 1974-02-08 | 1978-04-25 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50150259U (de) * | 1974-05-30 | 1975-12-13 | ||
JPS5311958U (de) * | 1976-07-13 | 1978-01-31 |
-
1979
- 1979-04-12 JP JP4449279A patent/JPS55135837A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5311958B2 (de) * | 1974-02-08 | 1978-04-25 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02133949A (ja) * | 1988-11-14 | 1990-05-23 | Hitachi Cable Ltd | リードフレームのスポットめっき方法 |
JPH0734930Y2 (ja) * | 1990-06-26 | 1995-08-09 | 富士プラント工業株式会社 | アイランド部にもメッキが必要なリードフレーム用の部分メッキ用マスク材 |
Also Published As
Publication number | Publication date |
---|---|
JPS55135837A (en) | 1980-10-23 |
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