JPS63250881A - 超電導体の作製方法 - Google Patents

超電導体の作製方法

Info

Publication number
JPS63250881A
JPS63250881A JP62086494A JP8649487A JPS63250881A JP S63250881 A JPS63250881 A JP S63250881A JP 62086494 A JP62086494 A JP 62086494A JP 8649487 A JP8649487 A JP 8649487A JP S63250881 A JPS63250881 A JP S63250881A
Authority
JP
Japan
Prior art keywords
superconducting
substrate
laser
ceramic
ceramics
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62086494A
Other languages
English (en)
Japanese (ja)
Inventor
Shunpei Yamazaki
舜平 山崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Energy Laboratory Co Ltd
Original Assignee
Semiconductor Energy Laboratory Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd
Priority to JP62086494A priority Critical patent/JPS63250881A/ja
Priority to US07/174,503 priority patent/US4957900A/en
Priority to DE3888003T priority patent/DE3888003T2/de
Priority to EP88303124A priority patent/EP0286410B1/de
Priority to CN88101989A priority patent/CN1013906B/zh
Priority to KR1019880003864A priority patent/KR910004993B1/ko
Publication of JPS63250881A publication Critical patent/JPS63250881A/ja
Priority to US07/538,740 priority patent/US5912211A/en
Priority to US07/763,596 priority patent/US5248658A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00Superconducting devices
    • H10N60/01Manufacture or treatment
    • H10N60/0268Manufacture or treatment of devices comprising copper oxide
    • H10N60/0661Processes performed after copper oxide formation, e.g. patterning
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/02Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
    • H01F41/04Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing coils
    • H01F41/048Superconductive coils
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F6/00Superconducting magnets; Superconducting coils
    • H01F6/06Coils, e.g. winding, insulating, terminating or casing arrangements therefor
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00Superconducting devices
    • H10N60/01Manufacture or treatment
    • H10N60/0268Manufacture or treatment of devices comprising copper oxide
    • H10N60/0296Processes for depositing or forming copper oxide superconductor layers
    • H10N60/0408Processes for depositing or forming copper oxide superconductor layers by sputtering
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00Superconducting devices
    • H10N60/01Manufacture or treatment
    • H10N60/0268Manufacture or treatment of devices comprising copper oxide
    • H10N60/0296Processes for depositing or forming copper oxide superconductor layers
    • H10N60/0521Processes for depositing or forming copper oxide superconductor layers by pulsed laser deposition, e.g. laser sputtering
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00Superconducting devices
    • H10N60/01Manufacture or treatment
    • H10N60/0268Manufacture or treatment of devices comprising copper oxide
    • H10N60/0296Processes for depositing or forming copper oxide superconductor layers
    • H10N60/0576Processes for depositing or forming copper oxide superconductor layers characterised by the substrate
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S428/00Stock material or miscellaneous articles
    • Y10S428/922Static electricity metal bleed-off metallic stock
    • Y10S428/9265Special properties
    • Y10S428/93Electric superconducting
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00Superconductor technology: apparatus, material, process
    • Y10S505/70High TC, above 30 k, superconducting device, article, or structured stock
    • Y10S505/701Coated or thin film device, i.e. active or passive
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00Superconductor technology: apparatus, material, process
    • Y10S505/70High TC, above 30 k, superconducting device, article, or structured stock
    • Y10S505/701Coated or thin film device, i.e. active or passive
    • Y10S505/703Microelectronic device with superconducting conduction line
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00Superconductor technology: apparatus, material, process
    • Y10S505/70High TC, above 30 k, superconducting device, article, or structured stock
    • Y10S505/704Wire, fiber, or cable
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00Superconductor technology: apparatus, material, process
    • Y10S505/70High TC, above 30 k, superconducting device, article, or structured stock
    • Y10S505/704Wire, fiber, or cable
    • Y10S505/705Magnetic coil
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00Superconductor technology: apparatus, material, process
    • Y10S505/725Process of making or treating high tc, above 30 k, superconducting shaped material, article, or device
    • Y10S505/728Etching
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00Superconductor technology: apparatus, material, process
    • Y10S505/725Process of making or treating high tc, above 30 k, superconducting shaped material, article, or device
    • Y10S505/73Vacuum treating or coating
    • Y10S505/731Sputter coating
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00Superconductor technology: apparatus, material, process
    • Y10S505/725Process of making or treating high tc, above 30 k, superconducting shaped material, article, or device
    • Y10S505/742Annealing
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/24Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24802Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]
    • Y10T428/24926Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.] including ceramic, glass, porcelain or quartz layer

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Physical Vapour Deposition (AREA)
JP62086494A 1987-04-07 1987-04-07 超電導体の作製方法 Pending JPS63250881A (ja)

Priority Applications (8)

Application Number Priority Date Filing Date Title
JP62086494A JPS63250881A (ja) 1987-04-07 1987-04-07 超電導体の作製方法
US07/174,503 US4957900A (en) 1987-04-07 1988-03-28 Method of manufacturing a superconducting pattern by light irradiation
DE3888003T DE3888003T2 (de) 1987-04-07 1988-04-07 Verfahren zur Herstellung keramischer Supraleiter.
EP88303124A EP0286410B1 (de) 1987-04-07 1988-04-07 Verfahren zur Herstellung keramischer Supraleiter
CN88101989A CN1013906B (zh) 1987-04-07 1988-04-07 用光照制造超导图形的方法
KR1019880003864A KR910004993B1 (ko) 1987-04-07 1988-04-07 광 조사에 의한 초전도 패턴의 제조방법
US07/538,740 US5912211A (en) 1987-04-07 1990-06-15 Method of manufacturing a superconducting pattern by light irradiation
US07/763,596 US5248658A (en) 1987-04-07 1991-09-23 Method of manufacturing a superconducting oxide pattern by laser sublimation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62086494A JPS63250881A (ja) 1987-04-07 1987-04-07 超電導体の作製方法

Publications (1)

Publication Number Publication Date
JPS63250881A true JPS63250881A (ja) 1988-10-18

Family

ID=13888534

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62086494A Pending JPS63250881A (ja) 1987-04-07 1987-04-07 超電導体の作製方法

Country Status (6)

Country Link
US (2) US4957900A (de)
EP (1) EP0286410B1 (de)
JP (1) JPS63250881A (de)
KR (1) KR910004993B1 (de)
CN (1) CN1013906B (de)
DE (1) DE3888003T2 (de)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63257127A (ja) * 1987-04-13 1988-10-25 Matsushita Electric Ind Co Ltd 薄膜超電導体の製造方法
JPS6433006A (en) * 1987-04-08 1989-02-02 Hitachi Ltd Production of superconducting oxide and superconducting device
JPS6448325A (en) * 1987-04-10 1989-02-22 American Telephone & Telegraph Manufacture of superconducting material layer
JP2006108637A (ja) * 2004-07-30 2006-04-20 Nexans シャント抵抗を有する超電導抵抗性電流制限器
JP2006237578A (ja) * 2005-01-12 2006-09-07 Nexans 超伝導電流制限部品

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5248658A (en) * 1987-04-07 1993-09-28 Semiconductor Energy Laboratory Co., Ltd. Method of manufacturing a superconducting oxide pattern by laser sublimation
JPS63250881A (ja) * 1987-04-07 1988-10-18 Semiconductor Energy Lab Co Ltd 超電導体の作製方法
US5401716A (en) * 1987-04-15 1995-03-28 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing superconducting patterns
US5041420A (en) * 1987-06-26 1991-08-20 Hewlett-Packard Company Method for making superconductor films from organometallic precursors
US5225394A (en) * 1987-08-31 1993-07-06 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing high Tc superconducting circuits
US5034359A (en) * 1988-04-08 1991-07-23 Kabushiki Kaisha Toshiba Insulating composition
FR2647266A1 (fr) * 1989-05-17 1990-11-23 Ecole Cle Arts Manufactures Element de circuit electrique ou electronique comportant un supraconducteur sur lequel sont fixes des elements conducteurs
US5248657A (en) * 1991-05-13 1993-09-28 General Dynamics Corporation, Space Systems Division Method for forming internally helixed high temperature superconductor assembly
JPH0812821B2 (ja) * 1992-07-23 1996-02-07 株式会社超伝導センサ研究所 磁気ピックアップコイル
CA2074896C (en) * 1992-07-29 2002-07-30 Linh Ngo Phong Process for making cuo superconductors
JPH0870144A (ja) * 1994-08-26 1996-03-12 Sumitomo Electric Ind Ltd 超電導部品の作製方法
GB9624586D0 (en) * 1996-11-27 1997-01-15 British Nuclear Fuels Plc Improvements in and relating to coils
US6069714A (en) * 1996-12-05 2000-05-30 Applied Science Fiction, Inc. Method and apparatus for reducing noise in electronic film development
JP4362009B2 (ja) * 1997-10-13 2009-11-11 ネクサン・スーパーコンダクターズ・ゲー・エム・ベー・ハー 高温超伝導材料からコイルを製造する方法及び低交流損失高温超伝導コイル
US6066830A (en) * 1998-06-04 2000-05-23 Astronics Corporation Laser etching of electroluminescent lamp electrode structures, and electroluminescent lamps produced thereby
US6703137B2 (en) * 2001-08-02 2004-03-09 Siemens Westinghouse Power Corporation Segmented thermal barrier coating and method of manufacturing the same
GB0120697D0 (en) 2001-08-24 2001-10-17 Coated Conductors Consultancy Superconducting coil fabrication
GB0305146D0 (en) * 2003-03-06 2003-04-09 Coated Conductors Consultancy Superconducting coil testing
US7879685B2 (en) * 2006-08-04 2011-02-01 Solyndra, Inc. System and method for creating electric isolation between layers comprising solar cells
US20080029152A1 (en) * 2006-08-04 2008-02-07 Erel Milshtein Laser scribing apparatus, systems, and methods
JP5327932B2 (ja) * 2007-02-08 2013-10-30 独立行政法人産業技術総合研究所 超電導コーティング材料の製造方法
DE102010040272B4 (de) * 2010-09-06 2018-04-19 Siemens Aktiengesellschaft Hochtemperatur-Supraleiter (HTS)-Spule
DE102011081465A1 (de) * 2011-08-24 2013-02-28 Siemens Aktiengesellschaft Verfahren zur Herstellung von supraleitenden Spulen und Vorrichtung mit einer supraleitenden Spule hergestellt nach dem Verfahren

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5269297A (en) * 1975-12-05 1977-06-08 Nippon Telegr & Teleph Corp <Ntt> Manufacture of josephson element
JPS5325996A (en) * 1976-08-24 1978-03-10 Toshiba Corp Laser working method
JPS5720486A (en) * 1980-07-11 1982-02-02 Nippon Telegr & Teleph Corp <Ntt> Superconductive integrated circuit and preparation thereof
JPS58176982A (ja) * 1982-04-12 1983-10-17 Agency Of Ind Science & Technol ジヨセフソン接合素子の製造方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4081653A (en) * 1976-12-27 1978-03-28 Western Electric Co., Inc. Removal of thin films from substrates by laser induced explosion
US4588947A (en) * 1983-12-30 1986-05-13 International Business Machines Corporation Integrated miniature DC SQUID susceptometer for measuring properties of very small samples
JPS61225807A (ja) * 1985-03-29 1986-10-07 Kobe Steel Ltd 超電導コイルの製造方法
US5232905A (en) * 1987-01-30 1993-08-03 Hitachi, Ltd. High Tc superconducting device with weak link between two superconducting electrodes
US4952554A (en) * 1987-04-01 1990-08-28 At&T Bell Laboratories Apparatus and systems comprising a clad superconductive oxide body, and method for producing such body
JPS63250881A (ja) * 1987-04-07 1988-10-18 Semiconductor Energy Lab Co Ltd 超電導体の作製方法
DE3718323A1 (de) * 1987-06-01 1988-12-22 Siemens Ag Verfahren zur oberflaechenbearbeitung, zum schneiden und dgl. von koerpern aus oxidwerkstoff
US4908346A (en) * 1987-07-01 1990-03-13 Eastman Kodak Company Crystalline rare earth alkaline earth copper oxide thick film circuit element with superconducting onset transition temperature in excess of 77%
JPS6411305A (en) * 1987-07-06 1989-01-13 Sumitomo Electric Industries Superconducting coil and manufacture thereof
JP2557486B2 (ja) * 1987-08-20 1996-11-27 住友電気工業株式会社 超電導セラミックス長尺体の製造方法および超電導セラミックス長尺体
US5079222A (en) * 1987-08-31 1992-01-07 Semiconductor Energy Laboratory Co., Ltd. Superconducting ceramic circuits and manufacturing method for the same
US4997809A (en) * 1987-11-18 1991-03-05 International Business Machines Corporation Fabrication of patterned lines of high Tc superconductors

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5269297A (en) * 1975-12-05 1977-06-08 Nippon Telegr & Teleph Corp <Ntt> Manufacture of josephson element
JPS5325996A (en) * 1976-08-24 1978-03-10 Toshiba Corp Laser working method
JPS5720486A (en) * 1980-07-11 1982-02-02 Nippon Telegr & Teleph Corp <Ntt> Superconductive integrated circuit and preparation thereof
JPS58176982A (ja) * 1982-04-12 1983-10-17 Agency Of Ind Science & Technol ジヨセフソン接合素子の製造方法

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6433006A (en) * 1987-04-08 1989-02-02 Hitachi Ltd Production of superconducting oxide and superconducting device
JPS6448325A (en) * 1987-04-10 1989-02-22 American Telephone & Telegraph Manufacture of superconducting material layer
JPS63257127A (ja) * 1987-04-13 1988-10-25 Matsushita Electric Ind Co Ltd 薄膜超電導体の製造方法
JP2006108637A (ja) * 2004-07-30 2006-04-20 Nexans シャント抵抗を有する超電導抵抗性電流制限器
JP2006237578A (ja) * 2005-01-12 2006-09-07 Nexans 超伝導電流制限部品

Also Published As

Publication number Publication date
DE3888003T2 (de) 1994-06-09
EP0286410A2 (de) 1988-10-12
CN1013906B (zh) 1991-09-11
DE3888003D1 (de) 1994-04-07
US4957900A (en) 1990-09-18
KR880013186A (ko) 1988-11-30
EP0286410B1 (de) 1994-03-02
CN88101989A (zh) 1988-10-26
EP0286410A3 (en) 1990-02-28
KR910004993B1 (ko) 1991-07-20
US5912211A (en) 1999-06-15

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