JPS6324617A - ウエハの両面露光法 - Google Patents

ウエハの両面露光法

Info

Publication number
JPS6324617A
JPS6324617A JP61168925A JP16892586A JPS6324617A JP S6324617 A JPS6324617 A JP S6324617A JP 61168925 A JP61168925 A JP 61168925A JP 16892586 A JP16892586 A JP 16892586A JP S6324617 A JPS6324617 A JP S6324617A
Authority
JP
Japan
Prior art keywords
double sided
double
silicon wafer
wafer
exposure method
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61168925A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0262939B2 (enrdf_load_stackoverflow
Inventor
Kyoichi Ikeda
恭一 池田
Tetsuya Watanabe
哲也 渡辺
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP61168925A priority Critical patent/JPS6324617A/ja
Publication of JPS6324617A publication Critical patent/JPS6324617A/ja
Publication of JPH0262939B2 publication Critical patent/JPH0262939B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7073—Alignment marks and their environment
    • G03F9/708—Mark formation
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7073—Alignment marks and their environment
    • G03F9/7084—Position of mark on substrate, i.e. position in (x, y, z) of mark, e.g. buried or resist covered mark, mark on rearside, at the substrate edge, in the circuit area, latent image mark, marks in plural levels

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP61168925A 1986-07-17 1986-07-17 ウエハの両面露光法 Granted JPS6324617A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61168925A JPS6324617A (ja) 1986-07-17 1986-07-17 ウエハの両面露光法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61168925A JPS6324617A (ja) 1986-07-17 1986-07-17 ウエハの両面露光法

Publications (2)

Publication Number Publication Date
JPS6324617A true JPS6324617A (ja) 1988-02-02
JPH0262939B2 JPH0262939B2 (enrdf_load_stackoverflow) 1990-12-27

Family

ID=15877089

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61168925A Granted JPS6324617A (ja) 1986-07-17 1986-07-17 ウエハの両面露光法

Country Status (1)

Country Link
JP (1) JPS6324617A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6049040A (ja) * 1983-08-29 1985-03-18 Japan Styrene Paper Co Ltd ポリプロピレン系樹脂発泡粒子
JP2012080004A (ja) * 2010-10-05 2012-04-19 Nikon Corp 露光装置、デバイス製造方法及び基板
US9627191B2 (en) 2009-09-17 2017-04-18 Wagic, Inc. Extendable multi-tool including interchangable light bulb changer and accessories
US9679760B2 (en) 2002-08-12 2017-06-13 Wagic, Inc. Customizable light bulb changer

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52152172A (en) * 1976-06-14 1977-12-17 Nippon Telegr & Teleph Corp <Ntt> Working method of mask alignment mark holes
JPS53127266A (en) * 1977-04-13 1978-11-07 Fujitsu Ltd Forming method of marker
JPS5459083A (en) * 1977-10-19 1979-05-12 Sumitomo Electric Ind Ltd Double-sided pattern forming method for semiconductor wafer

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52152172A (en) * 1976-06-14 1977-12-17 Nippon Telegr & Teleph Corp <Ntt> Working method of mask alignment mark holes
JPS53127266A (en) * 1977-04-13 1978-11-07 Fujitsu Ltd Forming method of marker
JPS5459083A (en) * 1977-10-19 1979-05-12 Sumitomo Electric Ind Ltd Double-sided pattern forming method for semiconductor wafer

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6049040A (ja) * 1983-08-29 1985-03-18 Japan Styrene Paper Co Ltd ポリプロピレン系樹脂発泡粒子
US9679760B2 (en) 2002-08-12 2017-06-13 Wagic, Inc. Customizable light bulb changer
US9627191B2 (en) 2009-09-17 2017-04-18 Wagic, Inc. Extendable multi-tool including interchangable light bulb changer and accessories
US10371360B2 (en) 2009-09-17 2019-08-06 Wagic, Inc. Extendable multi-tool including interchangable light bulb changer and accessories
JP2012080004A (ja) * 2010-10-05 2012-04-19 Nikon Corp 露光装置、デバイス製造方法及び基板

Also Published As

Publication number Publication date
JPH0262939B2 (enrdf_load_stackoverflow) 1990-12-27

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