JPS632342B2 - - Google Patents
Info
- Publication number
- JPS632342B2 JPS632342B2 JP15125580A JP15125580A JPS632342B2 JP S632342 B2 JPS632342 B2 JP S632342B2 JP 15125580 A JP15125580 A JP 15125580A JP 15125580 A JP15125580 A JP 15125580A JP S632342 B2 JPS632342 B2 JP S632342B2
- Authority
- JP
- Japan
- Prior art keywords
- insulating layer
- electrode
- pinholes
- cracks
- aluminum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910052751 metal Inorganic materials 0.000 claims description 13
- 239000002184 metal Substances 0.000 claims description 13
- 239000004065 semiconductor Substances 0.000 claims description 9
- 239000000758 substrate Substances 0.000 claims description 8
- 238000000034 method Methods 0.000 claims description 7
- 238000007743 anodising Methods 0.000 claims description 2
- 229910052782 aluminium Inorganic materials 0.000 description 9
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 9
- 230000003647 oxidation Effects 0.000 description 4
- 238000007254 oxidation reaction Methods 0.000 description 4
- 239000000523 sample Substances 0.000 description 4
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000002048 anodisation reaction Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15125580A JPS5774649A (en) | 1980-10-28 | 1980-10-28 | Inspecting method for insulating layer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15125580A JPS5774649A (en) | 1980-10-28 | 1980-10-28 | Inspecting method for insulating layer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5774649A JPS5774649A (en) | 1982-05-10 |
| JPS632342B2 true JPS632342B2 (US06650917-20031118-M00005.png) | 1988-01-18 |
Family
ID=15514659
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15125580A Granted JPS5774649A (en) | 1980-10-28 | 1980-10-28 | Inspecting method for insulating layer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5774649A (US06650917-20031118-M00005.png) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0232614U (US06650917-20031118-M00005.png) * | 1988-08-24 | 1990-02-28 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103822948B (zh) * | 2014-03-06 | 2016-06-08 | 上海华虹宏力半导体制造有限公司 | 半导体器件的测试方法 |
-
1980
- 1980-10-28 JP JP15125580A patent/JPS5774649A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0232614U (US06650917-20031118-M00005.png) * | 1988-08-24 | 1990-02-28 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5774649A (en) | 1982-05-10 |
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