JPS63222317A - 薄膜磁気ヘツド用基板材料 - Google Patents
薄膜磁気ヘツド用基板材料Info
- Publication number
- JPS63222317A JPS63222317A JP62054260A JP5426087A JPS63222317A JP S63222317 A JPS63222317 A JP S63222317A JP 62054260 A JP62054260 A JP 62054260A JP 5426087 A JP5426087 A JP 5426087A JP S63222317 A JPS63222317 A JP S63222317A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- tic
- substrate material
- improved
- specific resistance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 14
- 239000000463 material Substances 0.000 title claims abstract description 13
- 239000010409 thin film Substances 0.000 title claims abstract description 11
- 239000000654 additive Substances 0.000 abstract description 13
- 239000000919 ceramic Substances 0.000 abstract description 7
- 229910052581 Si3N4 Inorganic materials 0.000 abstract description 6
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 abstract description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract description 4
- QDOXWKRWXJOMAK-UHFFFAOYSA-N dichromium trioxide Chemical compound O=[Cr]O[Cr]=O QDOXWKRWXJOMAK-UHFFFAOYSA-N 0.000 abstract description 4
- MRELNEQAGSRDBK-UHFFFAOYSA-N lanthanum oxide Inorganic materials [O-2].[O-2].[O-2].[La+3].[La+3] MRELNEQAGSRDBK-UHFFFAOYSA-N 0.000 abstract description 3
- KTUFCUMIWABKDW-UHFFFAOYSA-N oxo(oxolanthaniooxy)lanthanum Chemical compound O=[La]O[La]=O KTUFCUMIWABKDW-UHFFFAOYSA-N 0.000 abstract description 3
- CETPSERCERDGAM-UHFFFAOYSA-N ceric oxide Chemical compound O=[Ce]=O CETPSERCERDGAM-UHFFFAOYSA-N 0.000 abstract description 2
- 229910000422 cerium(IV) oxide Inorganic materials 0.000 abstract description 2
- RUDFQVOCFDJEEF-UHFFFAOYSA-N yttrium(III) oxide Inorganic materials [O-2].[O-2].[O-2].[Y+3].[Y+3] RUDFQVOCFDJEEF-UHFFFAOYSA-N 0.000 abstract description 2
- 229910052593 corundum Inorganic materials 0.000 abstract 2
- 229910001845 yogo sapphire Inorganic materials 0.000 abstract 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 abstract 1
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 abstract 1
- FKTOIHSPIPYAPE-UHFFFAOYSA-N samarium(III) oxide Inorganic materials [O-2].[O-2].[O-2].[Sm+3].[Sm+3] FKTOIHSPIPYAPE-UHFFFAOYSA-N 0.000 abstract 1
- 229910052719 titanium Inorganic materials 0.000 abstract 1
- 239000010936 titanium Substances 0.000 abstract 1
- 230000000996 additive effect Effects 0.000 description 8
- 238000005245 sintering Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 6
- 238000005452 bending Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 230000001747 exhibiting effect Effects 0.000 description 2
- 239000000696 magnetic material Substances 0.000 description 2
- 230000001737 promoting effect Effects 0.000 description 2
- 230000002195 synergetic effect Effects 0.000 description 2
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 description 2
- 101100481408 Danio rerio tie2 gene Proteins 0.000 description 1
- 101100481410 Mus musculus Tek gene Proteins 0.000 description 1
- 101100389125 Rattus norvegicus Egln3 gene Proteins 0.000 description 1
- 229910005091 Si3N Inorganic materials 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000009422 growth inhibiting effect Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 229910000311 lanthanide oxide Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 229910000702 sendust Inorganic materials 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000005303 weighing Methods 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Landscapes
- Compositions Of Oxide Ceramics (AREA)
- Magnetic Heads (AREA)
- Thin Magnetic Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62054260A JPS63222317A (ja) | 1987-03-11 | 1987-03-11 | 薄膜磁気ヘツド用基板材料 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62054260A JPS63222317A (ja) | 1987-03-11 | 1987-03-11 | 薄膜磁気ヘツド用基板材料 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63222317A true JPS63222317A (ja) | 1988-09-16 |
| JPH0477372B2 JPH0477372B2 (enrdf_load_stackoverflow) | 1992-12-08 |
Family
ID=12965592
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62054260A Granted JPS63222317A (ja) | 1987-03-11 | 1987-03-11 | 薄膜磁気ヘツド用基板材料 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63222317A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1974473B (zh) | 2005-12-02 | 2010-06-02 | Tdk株式会社 | 磁头滑块用烧结体、磁头滑块和磁头滑块用烧结体的制造方法 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6039807A (ja) * | 1983-08-15 | 1985-03-01 | Sumitomo Special Metals Co Ltd | 絶縁膜を有する薄膜磁気ヘツド用基板材料 |
| JPS6059717A (ja) * | 1983-09-13 | 1985-04-06 | Hitachi Metals Ltd | 薄膜磁気ヘッド用セラミックス基板 |
| JPS61158862A (ja) * | 1984-12-29 | 1986-07-18 | ティーディーケイ株式会社 | 磁気ヘツドスライダ材料 |
| JPS61281059A (ja) * | 1985-06-05 | 1986-12-11 | 日立金属株式会社 | 導電性セラミツクス焼結体の製造法 |
-
1987
- 1987-03-11 JP JP62054260A patent/JPS63222317A/ja active Granted
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6039807A (ja) * | 1983-08-15 | 1985-03-01 | Sumitomo Special Metals Co Ltd | 絶縁膜を有する薄膜磁気ヘツド用基板材料 |
| JPS6059717A (ja) * | 1983-09-13 | 1985-04-06 | Hitachi Metals Ltd | 薄膜磁気ヘッド用セラミックス基板 |
| JPS61158862A (ja) * | 1984-12-29 | 1986-07-18 | ティーディーケイ株式会社 | 磁気ヘツドスライダ材料 |
| JPS61281059A (ja) * | 1985-06-05 | 1986-12-11 | 日立金属株式会社 | 導電性セラミツクス焼結体の製造法 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1974473B (zh) | 2005-12-02 | 2010-06-02 | Tdk株式会社 | 磁头滑块用烧结体、磁头滑块和磁头滑块用烧结体的制造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0477372B2 (enrdf_load_stackoverflow) | 1992-12-08 |
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