JPS63177416A - 被膜形成用装置 - Google Patents

被膜形成用装置

Info

Publication number
JPS63177416A
JPS63177416A JP62229326A JP22932687A JPS63177416A JP S63177416 A JPS63177416 A JP S63177416A JP 62229326 A JP62229326 A JP 62229326A JP 22932687 A JP22932687 A JP 22932687A JP S63177416 A JPS63177416 A JP S63177416A
Authority
JP
Japan
Prior art keywords
film
substrate
gas
helium
present
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62229326A
Other languages
English (en)
Japanese (ja)
Other versions
JPH048939B2 (enrdf_load_stackoverflow
Inventor
Shunpei Yamazaki
舜平 山崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP62229326A priority Critical patent/JPS63177416A/ja
Publication of JPS63177416A publication Critical patent/JPS63177416A/ja
Publication of JPH048939B2 publication Critical patent/JPH048939B2/ja
Granted legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Landscapes

  • Photovoltaic Devices (AREA)
JP62229326A 1987-09-12 1987-09-12 被膜形成用装置 Granted JPS63177416A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62229326A JPS63177416A (ja) 1987-09-12 1987-09-12 被膜形成用装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62229326A JPS63177416A (ja) 1987-09-12 1987-09-12 被膜形成用装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP57192055A Division JPS5895550A (ja) 1982-11-01 1982-11-01 非単結晶半導体層形成用装置

Publications (2)

Publication Number Publication Date
JPS63177416A true JPS63177416A (ja) 1988-07-21
JPH048939B2 JPH048939B2 (enrdf_load_stackoverflow) 1992-02-18

Family

ID=16890398

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62229326A Granted JPS63177416A (ja) 1987-09-12 1987-09-12 被膜形成用装置

Country Status (1)

Country Link
JP (1) JPS63177416A (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4916221A (enrdf_load_stackoverflow) * 1972-06-07 1974-02-13
JPS531465A (en) * 1976-06-25 1978-01-09 Matsushita Electric Ind Co Ltd Manufacturer for semiconductor mono crystal thin film and its manufacturing unit

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4916221A (enrdf_load_stackoverflow) * 1972-06-07 1974-02-13
JPS531465A (en) * 1976-06-25 1978-01-09 Matsushita Electric Ind Co Ltd Manufacturer for semiconductor mono crystal thin film and its manufacturing unit

Also Published As

Publication number Publication date
JPH048939B2 (enrdf_load_stackoverflow) 1992-02-18

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