JPH048939B2 - - Google Patents

Info

Publication number
JPH048939B2
JPH048939B2 JP62229326A JP22932687A JPH048939B2 JP H048939 B2 JPH048939 B2 JP H048939B2 JP 62229326 A JP62229326 A JP 62229326A JP 22932687 A JP22932687 A JP 22932687A JP H048939 B2 JPH048939 B2 JP H048939B2
Authority
JP
Japan
Prior art keywords
reaction
gas
film
substrate
heating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62229326A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63177416A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP62229326A priority Critical patent/JPS63177416A/ja
Publication of JPS63177416A publication Critical patent/JPS63177416A/ja
Publication of JPH048939B2 publication Critical patent/JPH048939B2/ja
Granted legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Landscapes

  • Photovoltaic Devices (AREA)
JP62229326A 1987-09-12 1987-09-12 被膜形成用装置 Granted JPS63177416A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62229326A JPS63177416A (ja) 1987-09-12 1987-09-12 被膜形成用装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62229326A JPS63177416A (ja) 1987-09-12 1987-09-12 被膜形成用装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP57192055A Division JPS5895550A (ja) 1982-11-01 1982-11-01 非単結晶半導体層形成用装置

Publications (2)

Publication Number Publication Date
JPS63177416A JPS63177416A (ja) 1988-07-21
JPH048939B2 true JPH048939B2 (enrdf_load_stackoverflow) 1992-02-18

Family

ID=16890398

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62229326A Granted JPS63177416A (ja) 1987-09-12 1987-09-12 被膜形成用装置

Country Status (1)

Country Link
JP (1) JPS63177416A (enrdf_load_stackoverflow)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5233895B2 (enrdf_load_stackoverflow) * 1972-06-07 1977-08-31
JPS531465A (en) * 1976-06-25 1978-01-09 Matsushita Electric Ind Co Ltd Manufacturer for semiconductor mono crystal thin film and its manufacturing unit

Also Published As

Publication number Publication date
JPS63177416A (ja) 1988-07-21

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