JPS63162857A - 真空蒸着装置 - Google Patents

真空蒸着装置

Info

Publication number
JPS63162857A
JPS63162857A JP31039386A JP31039386A JPS63162857A JP S63162857 A JPS63162857 A JP S63162857A JP 31039386 A JP31039386 A JP 31039386A JP 31039386 A JP31039386 A JP 31039386A JP S63162857 A JPS63162857 A JP S63162857A
Authority
JP
Japan
Prior art keywords
turntable
disc
disk
holder
rotation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP31039386A
Other languages
English (en)
Japanese (ja)
Other versions
JPH032949B2 (cs
Inventor
Kenji Sakashita
健司 坂下
Akira Nakai
仲井　章
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Mechatronics Corp
Original Assignee
Shibaura Engineering Works Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shibaura Engineering Works Co Ltd filed Critical Shibaura Engineering Works Co Ltd
Priority to JP31039386A priority Critical patent/JPS63162857A/ja
Publication of JPS63162857A publication Critical patent/JPS63162857A/ja
Publication of JPH032949B2 publication Critical patent/JPH032949B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP31039386A 1986-12-25 1986-12-25 真空蒸着装置 Granted JPS63162857A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP31039386A JPS63162857A (ja) 1986-12-25 1986-12-25 真空蒸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP31039386A JPS63162857A (ja) 1986-12-25 1986-12-25 真空蒸着装置

Publications (2)

Publication Number Publication Date
JPS63162857A true JPS63162857A (ja) 1988-07-06
JPH032949B2 JPH032949B2 (cs) 1991-01-17

Family

ID=18004719

Family Applications (1)

Application Number Title Priority Date Filing Date
JP31039386A Granted JPS63162857A (ja) 1986-12-25 1986-12-25 真空蒸着装置

Country Status (1)

Country Link
JP (1) JPS63162857A (cs)

Also Published As

Publication number Publication date
JPH032949B2 (cs) 1991-01-17

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term