JPS6315345B2 - - Google Patents

Info

Publication number
JPS6315345B2
JPS6315345B2 JP15828183A JP15828183A JPS6315345B2 JP S6315345 B2 JPS6315345 B2 JP S6315345B2 JP 15828183 A JP15828183 A JP 15828183A JP 15828183 A JP15828183 A JP 15828183A JP S6315345 B2 JPS6315345 B2 JP S6315345B2
Authority
JP
Japan
Prior art keywords
film
water vapor
transparent
magnesium oxide
moisture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP15828183A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6050164A (ja
Inventor
Shigemasa Kawai
Yoshuki Fukumoto
Kazu Yamanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sekisui Chemical Co Ltd
Original Assignee
Sekisui Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sekisui Chemical Co Ltd filed Critical Sekisui Chemical Co Ltd
Priority to JP15828183A priority Critical patent/JPS6050164A/ja
Publication of JPS6050164A publication Critical patent/JPS6050164A/ja
Publication of JPS6315345B2 publication Critical patent/JPS6315345B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/081—Oxides of aluminium, magnesium or beryllium

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Coating Of Shaped Articles Made Of Macromolecular Substances (AREA)
  • Physical Vapour Deposition (AREA)
JP15828183A 1983-08-29 1983-08-29 防湿性を有する透明薄膜の形成方法 Granted JPS6050164A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15828183A JPS6050164A (ja) 1983-08-29 1983-08-29 防湿性を有する透明薄膜の形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15828183A JPS6050164A (ja) 1983-08-29 1983-08-29 防湿性を有する透明薄膜の形成方法

Publications (2)

Publication Number Publication Date
JPS6050164A JPS6050164A (ja) 1985-03-19
JPS6315345B2 true JPS6315345B2 (cg-RX-API-DMAC7.html) 1988-04-04

Family

ID=15668165

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15828183A Granted JPS6050164A (ja) 1983-08-29 1983-08-29 防湿性を有する透明薄膜の形成方法

Country Status (1)

Country Link
JP (1) JPS6050164A (cg-RX-API-DMAC7.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02129426A (ja) * 1988-11-05 1990-05-17 Tokai Rubber Ind Ltd 流体封入式マウント装置

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62154676A (ja) * 1985-12-27 1987-07-09 Toyo Soda Mfg Co Ltd スパツタ薄膜の配向強度の改良方法
JPH0759747B2 (ja) * 1988-03-09 1995-06-28 日本真空技術株式会社 透明導電膜の製造方法
JPH05311412A (ja) * 1992-05-11 1993-11-22 Toppan Printing Co Ltd 蒸着材料および透明バリヤーフィルムの製造方法
JP2006010066A (ja) 2004-05-25 2006-01-12 Nichido Kogyo Kk 結束バンドおよび結束バンドセット

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02129426A (ja) * 1988-11-05 1990-05-17 Tokai Rubber Ind Ltd 流体封入式マウント装置

Also Published As

Publication number Publication date
JPS6050164A (ja) 1985-03-19

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