JPS6330988B2 - - Google Patents

Info

Publication number
JPS6330988B2
JPS6330988B2 JP15453083A JP15453083A JPS6330988B2 JP S6330988 B2 JPS6330988 B2 JP S6330988B2 JP 15453083 A JP15453083 A JP 15453083A JP 15453083 A JP15453083 A JP 15453083A JP S6330988 B2 JPS6330988 B2 JP S6330988B2
Authority
JP
Japan
Prior art keywords
film
thin film
moisture
transparent
torr
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP15453083A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6046363A (ja
Inventor
Shigemasa Kawai
Yoshuki Fukumoto
Kazu Yamanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sekisui Chemical Co Ltd
Original Assignee
Sekisui Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sekisui Chemical Co Ltd filed Critical Sekisui Chemical Co Ltd
Priority to JP15453083A priority Critical patent/JPS6046363A/ja
Publication of JPS6046363A publication Critical patent/JPS6046363A/ja
Publication of JPS6330988B2 publication Critical patent/JPS6330988B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Coating Of Shaped Articles Made Of Macromolecular Substances (AREA)
  • Physical Vapour Deposition (AREA)
JP15453083A 1983-08-23 1983-08-23 防湿性を有する透明薄膜の形成方法 Granted JPS6046363A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15453083A JPS6046363A (ja) 1983-08-23 1983-08-23 防湿性を有する透明薄膜の形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15453083A JPS6046363A (ja) 1983-08-23 1983-08-23 防湿性を有する透明薄膜の形成方法

Publications (2)

Publication Number Publication Date
JPS6046363A JPS6046363A (ja) 1985-03-13
JPS6330988B2 true JPS6330988B2 (cg-RX-API-DMAC7.html) 1988-06-21

Family

ID=15586267

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15453083A Granted JPS6046363A (ja) 1983-08-23 1983-08-23 防湿性を有する透明薄膜の形成方法

Country Status (1)

Country Link
JP (1) JPS6046363A (cg-RX-API-DMAC7.html)

Also Published As

Publication number Publication date
JPS6046363A (ja) 1985-03-13

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