JPS63141332A - 面板欠陥デ−タのズ−ミングマツプ表示方式 - Google Patents

面板欠陥デ−タのズ−ミングマツプ表示方式

Info

Publication number
JPS63141332A
JPS63141332A JP28799786A JP28799786A JPS63141332A JP S63141332 A JPS63141332 A JP S63141332A JP 28799786 A JP28799786 A JP 28799786A JP 28799786 A JP28799786 A JP 28799786A JP S63141332 A JPS63141332 A JP S63141332A
Authority
JP
Japan
Prior art keywords
rectangle
face plate
points
reference line
zooming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP28799786A
Other languages
English (en)
Japanese (ja)
Other versions
JPH035061B2 (Direct
Inventor
Yuichi Ota
雄一 太田
Osamu Ishiwata
石綿　修
Masashi Honda
本田　正志
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Electronics Engineering Co Ltd
Priority to JP28799786A priority Critical patent/JPS63141332A/ja
Publication of JPS63141332A publication Critical patent/JPS63141332A/ja
Publication of JPH035061B2 publication Critical patent/JPH035061B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP28799786A 1986-12-03 1986-12-03 面板欠陥デ−タのズ−ミングマツプ表示方式 Granted JPS63141332A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28799786A JPS63141332A (ja) 1986-12-03 1986-12-03 面板欠陥デ−タのズ−ミングマツプ表示方式

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28799786A JPS63141332A (ja) 1986-12-03 1986-12-03 面板欠陥デ−タのズ−ミングマツプ表示方式

Publications (2)

Publication Number Publication Date
JPS63141332A true JPS63141332A (ja) 1988-06-13
JPH035061B2 JPH035061B2 (Direct) 1991-01-24

Family

ID=17724465

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28799786A Granted JPS63141332A (ja) 1986-12-03 1986-12-03 面板欠陥デ−タのズ−ミングマツプ表示方式

Country Status (1)

Country Link
JP (1) JPS63141332A (Direct)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020003888A1 (ja) * 2018-06-27 2020-01-02 オムロン株式会社 外観検査システム、外観検査結果の表示方法、および、外観検査結果の表示プログラム

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020003888A1 (ja) * 2018-06-27 2020-01-02 オムロン株式会社 外観検査システム、外観検査結果の表示方法、および、外観検査結果の表示プログラム
JP2020003301A (ja) * 2018-06-27 2020-01-09 オムロン株式会社 外観検査システム、外観検査結果の表示方法、および、外観検査結果の表示プログラム

Also Published As

Publication number Publication date
JPH035061B2 (Direct) 1991-01-24

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