JPH0371780B2 - - Google Patents

Info

Publication number
JPH0371780B2
JPH0371780B2 JP29222586A JP29222586A JPH0371780B2 JP H0371780 B2 JPH0371780 B2 JP H0371780B2 JP 29222586 A JP29222586 A JP 29222586A JP 29222586 A JP29222586 A JP 29222586A JP H0371780 B2 JPH0371780 B2 JP H0371780B2
Authority
JP
Japan
Prior art keywords
face plate
reference line
angle
scanning
defect data
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP29222586A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63143829A (ja
Inventor
Masashi Honda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Electronics Engineering Co Ltd
Priority to JP29222586A priority Critical patent/JPS63143829A/ja
Publication of JPS63143829A publication Critical patent/JPS63143829A/ja
Publication of JPH0371780B2 publication Critical patent/JPH0371780B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP29222586A 1986-12-08 1986-12-08 面板欠陥デ−タのマツプ表示方法 Granted JPS63143829A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP29222586A JPS63143829A (ja) 1986-12-08 1986-12-08 面板欠陥デ−タのマツプ表示方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP29222586A JPS63143829A (ja) 1986-12-08 1986-12-08 面板欠陥デ−タのマツプ表示方法

Publications (2)

Publication Number Publication Date
JPS63143829A JPS63143829A (ja) 1988-06-16
JPH0371780B2 true JPH0371780B2 (Direct) 1991-11-14

Family

ID=17779118

Family Applications (1)

Application Number Title Priority Date Filing Date
JP29222586A Granted JPS63143829A (ja) 1986-12-08 1986-12-08 面板欠陥デ−タのマツプ表示方法

Country Status (1)

Country Link
JP (1) JPS63143829A (Direct)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4787185B2 (ja) * 2007-02-21 2011-10-05 株式会社トプコン ウエハ表面検査方法及びその装置
CN107993955A (zh) * 2017-11-24 2018-05-04 上海华力微电子有限公司 一种检测晶圆边缘缺陷的方法

Also Published As

Publication number Publication date
JPS63143829A (ja) 1988-06-16

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