JPH035061B2 - - Google Patents

Info

Publication number
JPH035061B2
JPH035061B2 JP28799786A JP28799786A JPH035061B2 JP H035061 B2 JPH035061 B2 JP H035061B2 JP 28799786 A JP28799786 A JP 28799786A JP 28799786 A JP28799786 A JP 28799786A JP H035061 B2 JPH035061 B2 JP H035061B2
Authority
JP
Japan
Prior art keywords
face plate
rectangle
defect data
display device
map
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP28799786A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63141332A (ja
Inventor
Juichi Oota
Osamu Ishiwata
Masashi Pponda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Electronics Engineering Co Ltd
Priority to JP28799786A priority Critical patent/JPS63141332A/ja
Publication of JPS63141332A publication Critical patent/JPS63141332A/ja
Publication of JPH035061B2 publication Critical patent/JPH035061B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP28799786A 1986-12-03 1986-12-03 面板欠陥デ−タのズ−ミングマツプ表示方式 Granted JPS63141332A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28799786A JPS63141332A (ja) 1986-12-03 1986-12-03 面板欠陥デ−タのズ−ミングマツプ表示方式

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28799786A JPS63141332A (ja) 1986-12-03 1986-12-03 面板欠陥デ−タのズ−ミングマツプ表示方式

Publications (2)

Publication Number Publication Date
JPS63141332A JPS63141332A (ja) 1988-06-13
JPH035061B2 true JPH035061B2 (Direct) 1991-01-24

Family

ID=17724465

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28799786A Granted JPS63141332A (ja) 1986-12-03 1986-12-03 面板欠陥デ−タのズ−ミングマツプ表示方式

Country Status (1)

Country Link
JP (1) JPS63141332A (Direct)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7070153B2 (ja) * 2018-06-27 2022-05-18 オムロン株式会社 外観検査システム、外観検査結果の表示方法、および、外観検査結果の表示プログラム

Also Published As

Publication number Publication date
JPS63141332A (ja) 1988-06-13

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