JPS6312347Y2 - - Google Patents

Info

Publication number
JPS6312347Y2
JPS6312347Y2 JP1984149959U JP14995984U JPS6312347Y2 JP S6312347 Y2 JPS6312347 Y2 JP S6312347Y2 JP 1984149959 U JP1984149959 U JP 1984149959U JP 14995984 U JP14995984 U JP 14995984U JP S6312347 Y2 JPS6312347 Y2 JP S6312347Y2
Authority
JP
Japan
Prior art keywords
vram
mask
ion
defect
repair
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984149959U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6166354U (de
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984149959U priority Critical patent/JPS6312347Y2/ja
Publication of JPS6166354U publication Critical patent/JPS6166354U/ja
Application granted granted Critical
Publication of JPS6312347Y2 publication Critical patent/JPS6312347Y2/ja
Expired legal-status Critical Current

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  • Physical Vapour Deposition (AREA)
JP1984149959U 1984-10-03 1984-10-03 Expired JPS6312347Y2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984149959U JPS6312347Y2 (de) 1984-10-03 1984-10-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984149959U JPS6312347Y2 (de) 1984-10-03 1984-10-03

Publications (2)

Publication Number Publication Date
JPS6166354U JPS6166354U (de) 1986-05-07
JPS6312347Y2 true JPS6312347Y2 (de) 1988-04-08

Family

ID=30708123

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984149959U Expired JPS6312347Y2 (de) 1984-10-03 1984-10-03

Country Status (1)

Country Link
JP (1) JPS6312347Y2 (de)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5856332A (ja) * 1981-09-30 1983-04-04 Hitachi Ltd マスクの欠陥修正方法
JPS58196020A (ja) * 1982-05-12 1983-11-15 Hitachi Ltd マスクの欠陥検査・修正方法およびその装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5856332A (ja) * 1981-09-30 1983-04-04 Hitachi Ltd マスクの欠陥修正方法
JPS58196020A (ja) * 1982-05-12 1983-11-15 Hitachi Ltd マスクの欠陥検査・修正方法およびその装置

Also Published As

Publication number Publication date
JPS6166354U (de) 1986-05-07

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