JPS6312348Y2 - - Google Patents
Info
- Publication number
- JPS6312348Y2 JPS6312348Y2 JP1984149960U JP14996084U JPS6312348Y2 JP S6312348 Y2 JPS6312348 Y2 JP S6312348Y2 JP 1984149960 U JP1984149960 U JP 1984149960U JP 14996084 U JP14996084 U JP 14996084U JP S6312348 Y2 JPS6312348 Y2 JP S6312348Y2
- Authority
- JP
- Japan
- Prior art keywords
- vram
- ion
- etching
- signal
- secondary ion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005530 etching Methods 0.000 claims description 10
- 238000010884 ion-beam technique Methods 0.000 claims description 7
- 230000007547 defect Effects 0.000 claims description 2
- 150000002500 ions Chemical class 0.000 description 15
- 229910001430 chromium ion Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 206010027146 Melanoderma Diseases 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984149960U JPS6312348Y2 (de) | 1984-10-03 | 1984-10-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984149960U JPS6312348Y2 (de) | 1984-10-03 | 1984-10-03 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6166355U JPS6166355U (de) | 1986-05-07 |
| JPS6312348Y2 true JPS6312348Y2 (de) | 1988-04-08 |
Family
ID=30708124
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984149960U Expired JPS6312348Y2 (de) | 1984-10-03 | 1984-10-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6312348Y2 (de) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101971091B (zh) * | 2008-02-28 | 2013-06-19 | 卡尔蔡司Sms有限责任公司 | 具有微型化结构的物体的加工方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5856332A (ja) * | 1981-09-30 | 1983-04-04 | Hitachi Ltd | マスクの欠陥修正方法 |
| JPS58196020A (ja) * | 1982-05-12 | 1983-11-15 | Hitachi Ltd | マスクの欠陥検査・修正方法およびその装置 |
-
1984
- 1984-10-03 JP JP1984149960U patent/JPS6312348Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5856332A (ja) * | 1981-09-30 | 1983-04-04 | Hitachi Ltd | マスクの欠陥修正方法 |
| JPS58196020A (ja) * | 1982-05-12 | 1983-11-15 | Hitachi Ltd | マスクの欠陥検査・修正方法およびその装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6166355U (de) | 1986-05-07 |
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