JPS63117037A - 有機シラザン重合体の製造方法 - Google Patents

有機シラザン重合体の製造方法

Info

Publication number
JPS63117037A
JPS63117037A JP61261634A JP26163486A JPS63117037A JP S63117037 A JPS63117037 A JP S63117037A JP 61261634 A JP61261634 A JP 61261634A JP 26163486 A JP26163486 A JP 26163486A JP S63117037 A JPS63117037 A JP S63117037A
Authority
JP
Japan
Prior art keywords
manufacturing
polymer
silazane polymer
mol
organic silazane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61261634A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0219135B2 (enrdf_load_stackoverflow
Inventor
Yoshifumi Takeda
竹田　好文
Minoru Takamizawa
高見沢　稔
Akira Hayashida
章 林田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd filed Critical Shin Etsu Chemical Co Ltd
Priority to JP61261634A priority Critical patent/JPS63117037A/ja
Priority to US07/114,111 priority patent/US4869854A/en
Priority to FR8715124A priority patent/FR2606777B1/fr
Priority to DE3736914A priority patent/DE3736914C2/de
Publication of JPS63117037A publication Critical patent/JPS63117037A/ja
Publication of JPH0219135B2 publication Critical patent/JPH0219135B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Catalysts (AREA)
  • Silicon Polymers (AREA)
  • Inorganic Fibers (AREA)
  • Ceramic Products (AREA)
  • Carbon And Carbon Compounds (AREA)
JP61261634A 1986-10-31 1986-10-31 有機シラザン重合体の製造方法 Granted JPS63117037A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP61261634A JPS63117037A (ja) 1986-10-31 1986-10-31 有機シラザン重合体の製造方法
US07/114,111 US4869854A (en) 1986-10-31 1987-10-27 Process for manufacturing organic silazane polymers and ceramics therefrom
FR8715124A FR2606777B1 (fr) 1986-10-31 1987-10-30 Procede de fabrication de polymeres silazanes organiques et utilisation de ces polymeres pour fabriquer des ceramiques
DE3736914A DE3736914C2 (de) 1986-10-31 1987-10-30 Verfahren zur Herstellung von organischen Silazanpolymeren und daraus gebildeten Keramikmaterialien

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61261634A JPS63117037A (ja) 1986-10-31 1986-10-31 有機シラザン重合体の製造方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP1244168A Division JPH02120279A (ja) 1989-09-19 1989-09-19 セラミックスの製造方法

Publications (2)

Publication Number Publication Date
JPS63117037A true JPS63117037A (ja) 1988-05-21
JPH0219135B2 JPH0219135B2 (enrdf_load_stackoverflow) 1990-04-27

Family

ID=17364618

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61261634A Granted JPS63117037A (ja) 1986-10-31 1986-10-31 有機シラザン重合体の製造方法

Country Status (1)

Country Link
JP (1) JPS63117037A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115605530A (zh) * 2020-05-07 2023-01-13 默克专利有限公司（De） 聚碳硅氮烷和包含其的组合物以及使用其制造含硅膜的方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57117532A (en) * 1981-01-15 1982-07-22 Dow Corning Manufacture of poly(disilyl)silazane polymer
US4397828A (en) * 1981-11-16 1983-08-09 Massachusetts Institute Of Technology Stable liquid polymeric precursor to silicon nitride and process
JPS60226890A (ja) * 1984-01-19 1985-11-12 マサチユ−セツツ・インステチユ−ト・オブ・テクノロジ− プレセラミツク有機シラザン重合体

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57117532A (en) * 1981-01-15 1982-07-22 Dow Corning Manufacture of poly(disilyl)silazane polymer
US4397828A (en) * 1981-11-16 1983-08-09 Massachusetts Institute Of Technology Stable liquid polymeric precursor to silicon nitride and process
JPS60226890A (ja) * 1984-01-19 1985-11-12 マサチユ−セツツ・インステチユ−ト・オブ・テクノロジ− プレセラミツク有機シラザン重合体

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115605530A (zh) * 2020-05-07 2023-01-13 默克专利有限公司（De） 聚碳硅氮烷和包含其的组合物以及使用其制造含硅膜的方法
JP2023510050A (ja) * 2020-05-07 2023-03-10 メルク パテント ゲゼルシャフト ミット ベシュレンクテル ハフツング ポリカルボシラザンおよびそれを含む組成物、ならびにそれを用いたケイ素含有膜の製造方法
US11999827B2 (en) 2020-05-07 2024-06-04 Merck Patent Gmbh Polycarbosilazane, and composition comprising the same, and method for producing silicon-containing film using the same

Also Published As

Publication number Publication date
JPH0219135B2 (enrdf_load_stackoverflow) 1990-04-27

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