JPS6282514A - ディスク部材の洗浄装置 - Google Patents

ディスク部材の洗浄装置

Info

Publication number
JPS6282514A
JPS6282514A JP60221910A JP22191085A JPS6282514A JP S6282514 A JPS6282514 A JP S6282514A JP 60221910 A JP60221910 A JP 60221910A JP 22191085 A JP22191085 A JP 22191085A JP S6282514 A JPS6282514 A JP S6282514A
Authority
JP
Japan
Prior art keywords
cleaning
disk member
rotary table
disk
work
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60221910A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0355888B2 (enrdf_load_stackoverflow
Inventor
Kazuhiko Kenmori
権守　和彦
Takashi Hibiya
隆 日比谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Electronics Engineering Co Ltd
Priority to JP60221910A priority Critical patent/JPS6282514A/ja
Publication of JPS6282514A publication Critical patent/JPS6282514A/ja
Publication of JPH0355888B2 publication Critical patent/JPH0355888B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Manufacturing Optical Record Carriers (AREA)
JP60221910A 1985-10-07 1985-10-07 ディスク部材の洗浄装置 Granted JPS6282514A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60221910A JPS6282514A (ja) 1985-10-07 1985-10-07 ディスク部材の洗浄装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60221910A JPS6282514A (ja) 1985-10-07 1985-10-07 ディスク部材の洗浄装置

Publications (2)

Publication Number Publication Date
JPS6282514A true JPS6282514A (ja) 1987-04-16
JPH0355888B2 JPH0355888B2 (enrdf_load_stackoverflow) 1991-08-26

Family

ID=16774072

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60221910A Granted JPS6282514A (ja) 1985-10-07 1985-10-07 ディスク部材の洗浄装置

Country Status (1)

Country Link
JP (1) JPS6282514A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0355888B2 (enrdf_load_stackoverflow) 1991-08-26

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