JPS6276643A - ウエハの非接触位置決め装置 - Google Patents

ウエハの非接触位置決め装置

Info

Publication number
JPS6276643A
JPS6276643A JP21477485A JP21477485A JPS6276643A JP S6276643 A JPS6276643 A JP S6276643A JP 21477485 A JP21477485 A JP 21477485A JP 21477485 A JP21477485 A JP 21477485A JP S6276643 A JPS6276643 A JP S6276643A
Authority
JP
Japan
Prior art keywords
wafer
reference light
light
orientation flat
positioning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP21477485A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0224380B2 (cg-RX-API-DMAC7.html
Inventor
Katsushige Nakamura
勝重 中村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitaka Kohki Co Ltd
Original Assignee
Mitaka Kohki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitaka Kohki Co Ltd filed Critical Mitaka Kohki Co Ltd
Priority to JP21477485A priority Critical patent/JPS6276643A/ja
Publication of JPS6276643A publication Critical patent/JPS6276643A/ja
Publication of JPH0224380B2 publication Critical patent/JPH0224380B2/ja
Granted legal-status Critical Current

Links

JP21477485A 1985-09-30 1985-09-30 ウエハの非接触位置決め装置 Granted JPS6276643A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21477485A JPS6276643A (ja) 1985-09-30 1985-09-30 ウエハの非接触位置決め装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21477485A JPS6276643A (ja) 1985-09-30 1985-09-30 ウエハの非接触位置決め装置

Publications (2)

Publication Number Publication Date
JPS6276643A true JPS6276643A (ja) 1987-04-08
JPH0224380B2 JPH0224380B2 (cg-RX-API-DMAC7.html) 1990-05-29

Family

ID=16661310

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21477485A Granted JPS6276643A (ja) 1985-09-30 1985-09-30 ウエハの非接触位置決め装置

Country Status (1)

Country Link
JP (1) JPS6276643A (cg-RX-API-DMAC7.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01106440A (ja) * 1987-10-20 1989-04-24 Fujitsu Ltd ウエハ位置決め装置
US6677602B1 (en) * 2000-08-18 2004-01-13 Sensys Instruments Corporation Notch and flat sensor for wafer alignment

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0592714U (ja) * 1992-05-12 1993-12-17 株式会社中山製鋼所 鋼板の超音波探傷試験作業機

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59208849A (ja) * 1983-05-13 1984-11-27 Hitachi Ltd 板状物の位置合わせ方法および装置
JPS6132539A (ja) * 1984-07-25 1986-02-15 Hitachi Ltd ウエハ位置決め装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59208849A (ja) * 1983-05-13 1984-11-27 Hitachi Ltd 板状物の位置合わせ方法および装置
JPS6132539A (ja) * 1984-07-25 1986-02-15 Hitachi Ltd ウエハ位置決め装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01106440A (ja) * 1987-10-20 1989-04-24 Fujitsu Ltd ウエハ位置決め装置
US6677602B1 (en) * 2000-08-18 2004-01-13 Sensys Instruments Corporation Notch and flat sensor for wafer alignment

Also Published As

Publication number Publication date
JPH0224380B2 (cg-RX-API-DMAC7.html) 1990-05-29

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