JPS6276530A - ウェハ搬送機構 - Google Patents

ウェハ搬送機構

Info

Publication number
JPS6276530A
JPS6276530A JP21545885A JP21545885A JPS6276530A JP S6276530 A JPS6276530 A JP S6276530A JP 21545885 A JP21545885 A JP 21545885A JP 21545885 A JP21545885 A JP 21545885A JP S6276530 A JPS6276530 A JP S6276530A
Authority
JP
Japan
Prior art keywords
article
wafer
support
suction
leaf spring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP21545885A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0160945B2 (enrdf_load_stackoverflow
Inventor
Hiroyasu Tominaga
富永　浩康
Hideya Matsumoto
松本　秀也
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Electronics Engineering Co Ltd
Priority to JP21545885A priority Critical patent/JPS6276530A/ja
Publication of JPS6276530A publication Critical patent/JPS6276530A/ja
Publication of JPH0160945B2 publication Critical patent/JPH0160945B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Feeding Of Workpieces (AREA)
  • Manipulator (AREA)
  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
JP21545885A 1985-09-28 1985-09-28 ウェハ搬送機構 Granted JPS6276530A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21545885A JPS6276530A (ja) 1985-09-28 1985-09-28 ウェハ搬送機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21545885A JPS6276530A (ja) 1985-09-28 1985-09-28 ウェハ搬送機構

Publications (2)

Publication Number Publication Date
JPS6276530A true JPS6276530A (ja) 1987-04-08
JPH0160945B2 JPH0160945B2 (enrdf_load_stackoverflow) 1989-12-26

Family

ID=16672704

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21545885A Granted JPS6276530A (ja) 1985-09-28 1985-09-28 ウェハ搬送機構

Country Status (1)

Country Link
JP (1) JPS6276530A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07263037A (ja) * 1994-03-18 1995-10-13 Nichifu Co Ltd 線状発熱体の接続構造
JP2010001146A (ja) * 2008-06-23 2010-01-07 Nissan Motor Co Ltd 薄膜状ワークの積層方法および積載装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4714587U (enrdf_load_stackoverflow) * 1971-03-18 1972-10-20
JPS50117576U (enrdf_load_stackoverflow) * 1974-03-07 1975-09-25

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4714587U (enrdf_load_stackoverflow) * 1971-03-18 1972-10-20
JPS50117576U (enrdf_load_stackoverflow) * 1974-03-07 1975-09-25

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07263037A (ja) * 1994-03-18 1995-10-13 Nichifu Co Ltd 線状発熱体の接続構造
JP2010001146A (ja) * 2008-06-23 2010-01-07 Nissan Motor Co Ltd 薄膜状ワークの積層方法および積載装置

Also Published As

Publication number Publication date
JPH0160945B2 (enrdf_load_stackoverflow) 1989-12-26

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