JPS6259919B2 - - Google Patents
Info
- Publication number
- JPS6259919B2 JPS6259919B2 JP16933481A JP16933481A JPS6259919B2 JP S6259919 B2 JPS6259919 B2 JP S6259919B2 JP 16933481 A JP16933481 A JP 16933481A JP 16933481 A JP16933481 A JP 16933481A JP S6259919 B2 JPS6259919 B2 JP S6259919B2
- Authority
- JP
- Japan
- Prior art keywords
- transparent conductive
- conductive film
- insulating film
- film
- resist
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000034 method Methods 0.000 claims description 19
- 239000000758 substrate Substances 0.000 claims description 17
- 238000001312 dry etching Methods 0.000 claims description 12
- 238000005530 etching Methods 0.000 claims description 11
- 238000000059 patterning Methods 0.000 claims description 4
- 239000004020 conductor Substances 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims 1
- 230000007261 regionalization Effects 0.000 claims 1
- 239000010408 film Substances 0.000 description 62
- 229920002120 photoresistant polymer Polymers 0.000 description 7
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 6
- 229910004298 SiO 2 Inorganic materials 0.000 description 4
- 230000007547 defect Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 238000005566 electron beam evaporation Methods 0.000 description 2
- 238000001459 lithography Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000001947 vapour-phase growth Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Landscapes
- Manufacturing Of Printed Circuit Boards (AREA)
- Manufacturing Of Electric Cables (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16933481A JPS5870594A (ja) | 1981-10-21 | 1981-10-21 | パタ−ン形成法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16933481A JPS5870594A (ja) | 1981-10-21 | 1981-10-21 | パタ−ン形成法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5870594A JPS5870594A (ja) | 1983-04-27 |
| JPS6259919B2 true JPS6259919B2 (US07122547-20061017-C00224.png) | 1987-12-14 |
Family
ID=15884620
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16933481A Granted JPS5870594A (ja) | 1981-10-21 | 1981-10-21 | パタ−ン形成法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5870594A (US07122547-20061017-C00224.png) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01145652U (US07122547-20061017-C00224.png) * | 1988-03-17 | 1989-10-06 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0779188B2 (ja) * | 1990-05-31 | 1995-08-23 | カシオ計算機株式会社 | 両面配線基板の製造方法 |
| JP4998919B2 (ja) * | 2007-06-14 | 2012-08-15 | ソニーモバイルディスプレイ株式会社 | 静電容量型入力装置 |
-
1981
- 1981-10-21 JP JP16933481A patent/JPS5870594A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01145652U (US07122547-20061017-C00224.png) * | 1988-03-17 | 1989-10-06 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5870594A (ja) | 1983-04-27 |
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