JPS6255612B2 - - Google Patents

Info

Publication number
JPS6255612B2
JPS6255612B2 JP8258080A JP8258080A JPS6255612B2 JP S6255612 B2 JPS6255612 B2 JP S6255612B2 JP 8258080 A JP8258080 A JP 8258080A JP 8258080 A JP8258080 A JP 8258080A JP S6255612 B2 JPS6255612 B2 JP S6255612B2
Authority
JP
Japan
Prior art keywords
humidity
thickness
mode
frequency
vibration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP8258080A
Other languages
English (en)
Japanese (ja)
Other versions
JPS577538A (en
Inventor
Futoshi Uchama
Sumyuki Ishigami
Yasushi Saito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Tokyo Denpa Co Ltd
Original Assignee
Agency of Industrial Science and Technology
Tokyo Denpa Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology, Tokyo Denpa Co Ltd filed Critical Agency of Industrial Science and Technology
Priority to JP8258080A priority Critical patent/JPS577538A/ja
Publication of JPS577538A publication Critical patent/JPS577538A/ja
Publication of JPS6255612B2 publication Critical patent/JPS6255612B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/028—Material parameters
    • G01N2291/02845—Humidity, wetness

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
JP8258080A 1980-06-18 1980-06-18 Piezo-electric humidity sensor Granted JPS577538A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8258080A JPS577538A (en) 1980-06-18 1980-06-18 Piezo-electric humidity sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8258080A JPS577538A (en) 1980-06-18 1980-06-18 Piezo-electric humidity sensor

Publications (2)

Publication Number Publication Date
JPS577538A JPS577538A (en) 1982-01-14
JPS6255612B2 true JPS6255612B2 (enrdf_load_stackoverflow) 1987-11-20

Family

ID=13778411

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8258080A Granted JPS577538A (en) 1980-06-18 1980-06-18 Piezo-electric humidity sensor

Country Status (1)

Country Link
JP (1) JPS577538A (enrdf_load_stackoverflow)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60198445A (ja) * 1984-03-22 1985-10-07 Shimada Phys & Chem Ind Co Ltd 湿度センサ−
EP0206608B1 (en) * 1985-06-10 1993-09-08 United States Department Of Energy Fuel cell integrated with steam reformer
US5032365A (en) * 1988-06-14 1991-07-16 Mitsubishi Denki Kabushiki Kaisha Reaction apparatus
US5164163A (en) * 1988-09-19 1992-11-17 Kabushiki Kaisha Kobe Seiko Sho Hydrocarbon reforming apparatus
JPH03232703A (ja) * 1989-12-26 1991-10-16 Tokyo Electric Power Co Inc:The 炭化水素の改質装置
JP4890911B2 (ja) * 2006-03-31 2012-03-07 京セラキンセキ株式会社 Ｑｃｍセンサ素子
JP5435243B2 (ja) * 2011-02-14 2014-03-05 セイコーエプソン株式会社 振動子及び電子機器

Also Published As

Publication number Publication date
JPS577538A (en) 1982-01-14

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