JPS577538A - Piezo-electric humidity sensor - Google Patents

Piezo-electric humidity sensor

Info

Publication number
JPS577538A
JPS577538A JP8258080A JP8258080A JPS577538A JP S577538 A JPS577538 A JP S577538A JP 8258080 A JP8258080 A JP 8258080A JP 8258080 A JP8258080 A JP 8258080A JP S577538 A JPS577538 A JP S577538A
Authority
JP
Japan
Prior art keywords
film
humidity
vibration
thickness
piezo
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8258080A
Other languages
Japanese (ja)
Other versions
JPS6255612B2 (en
Inventor
Futoshi Uchiyama
Sumiyuki Ishigami
Yasushi Saito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Tokyo Denpa Co Ltd
Original Assignee
Agency of Industrial Science and Technology
Tokyo Denpa Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology, Tokyo Denpa Co Ltd filed Critical Agency of Industrial Science and Technology
Priority to JP8258080A priority Critical patent/JPS577538A/en
Publication of JPS577538A publication Critical patent/JPS577538A/en
Publication of JPS6255612B2 publication Critical patent/JPS6255612B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/028—Material parameters
    • G01N2291/02845—Humidity, wetness

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)

Abstract

PURPOSE:To achieve a stable measurement of humidity with the oscillation of a vibrator stopped at a desired humidity by specigying the thickenss of a film of a hygroscopic material coated on a piezo-electric vibration plate to ensure a proper combination with the required vibration mode at a given humidity. CONSTITUTION:A hygroscopic material such as polymide is applied on the surface of an electrode 2 provided on the surface and the back of a rectangular piezo- electric vibration plate to 1 form a hygroscopic material film 4. Changing the thickness of the elctrode 2 reduces the main vibration frequency of the vibration plate 1 in proportion to the thickness thereof, so that the frequency in the unwanted vibration mode little changes. On the other hand, absorbing the humidity with the film 4 substantially changes the thickness of the electrode 2. Therefore, when the thickness of the hygroscopic film 4 is selected so that the main vibration mode is properly combined with the undesired vibration mode, a hmidity according to the film 4 increases the euivalent resistance of the vibration plate 1 so suddenly to halt the vibration thereby assuring a stable measurement of humidity.
JP8258080A 1980-06-18 1980-06-18 Piezo-electric humidity sensor Granted JPS577538A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8258080A JPS577538A (en) 1980-06-18 1980-06-18 Piezo-electric humidity sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8258080A JPS577538A (en) 1980-06-18 1980-06-18 Piezo-electric humidity sensor

Publications (2)

Publication Number Publication Date
JPS577538A true JPS577538A (en) 1982-01-14
JPS6255612B2 JPS6255612B2 (en) 1987-11-20

Family

ID=13778411

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8258080A Granted JPS577538A (en) 1980-06-18 1980-06-18 Piezo-electric humidity sensor

Country Status (1)

Country Link
JP (1) JPS577538A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60198445A (en) * 1984-03-22 1985-10-07 Shimada Phys & Chem Ind Co Ltd Humidity sensor
JPS61285675A (en) * 1985-06-10 1986-12-16 アメリカ合衆国 Fuel battery integragted with steam modifier
US5032365A (en) * 1988-06-14 1991-07-16 Mitsubishi Denki Kabushiki Kaisha Reaction apparatus
US5164163A (en) * 1988-09-19 1992-11-17 Kabushiki Kaisha Kobe Seiko Sho Hydrocarbon reforming apparatus
US5226928A (en) * 1989-12-26 1993-07-13 The Tokyo Electric Power Company, Incorporated Reforming apparatus for hydrocarbon
JP2007271449A (en) * 2006-03-31 2007-10-18 Kyocera Kinseki Corp Qcm sensor element
JP2011117972A (en) * 2011-02-14 2011-06-16 Seiko Epson Corp Vibrator, vibrator array, and electronic apparatus

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60198445A (en) * 1984-03-22 1985-10-07 Shimada Phys & Chem Ind Co Ltd Humidity sensor
JPH0345782B2 (en) * 1984-03-22 1991-07-12 Shimada Rika Kogyo Kk
JPS61285675A (en) * 1985-06-10 1986-12-16 アメリカ合衆国 Fuel battery integragted with steam modifier
US5032365A (en) * 1988-06-14 1991-07-16 Mitsubishi Denki Kabushiki Kaisha Reaction apparatus
US5164163A (en) * 1988-09-19 1992-11-17 Kabushiki Kaisha Kobe Seiko Sho Hydrocarbon reforming apparatus
US5226928A (en) * 1989-12-26 1993-07-13 The Tokyo Electric Power Company, Incorporated Reforming apparatus for hydrocarbon
JP2007271449A (en) * 2006-03-31 2007-10-18 Kyocera Kinseki Corp Qcm sensor element
JP2011117972A (en) * 2011-02-14 2011-06-16 Seiko Epson Corp Vibrator, vibrator array, and electronic apparatus

Also Published As

Publication number Publication date
JPS6255612B2 (en) 1987-11-20

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