JPS577538A - Piezo-electric humidity sensor - Google Patents
Piezo-electric humidity sensorInfo
- Publication number
- JPS577538A JPS577538A JP8258080A JP8258080A JPS577538A JP S577538 A JPS577538 A JP S577538A JP 8258080 A JP8258080 A JP 8258080A JP 8258080 A JP8258080 A JP 8258080A JP S577538 A JPS577538 A JP S577538A
- Authority
- JP
- Japan
- Prior art keywords
- film
- humidity
- vibration
- thickness
- piezo
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
- G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/028—Material parameters
- G01N2291/02845—Humidity, wetness
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
Abstract
PURPOSE:To achieve a stable measurement of humidity with the oscillation of a vibrator stopped at a desired humidity by specigying the thickenss of a film of a hygroscopic material coated on a piezo-electric vibration plate to ensure a proper combination with the required vibration mode at a given humidity. CONSTITUTION:A hygroscopic material such as polymide is applied on the surface of an electrode 2 provided on the surface and the back of a rectangular piezo- electric vibration plate to 1 form a hygroscopic material film 4. Changing the thickness of the elctrode 2 reduces the main vibration frequency of the vibration plate 1 in proportion to the thickness thereof, so that the frequency in the unwanted vibration mode little changes. On the other hand, absorbing the humidity with the film 4 substantially changes the thickness of the electrode 2. Therefore, when the thickness of the hygroscopic film 4 is selected so that the main vibration mode is properly combined with the undesired vibration mode, a hmidity according to the film 4 increases the euivalent resistance of the vibration plate 1 so suddenly to halt the vibration thereby assuring a stable measurement of humidity.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8258080A JPS577538A (en) | 1980-06-18 | 1980-06-18 | Piezo-electric humidity sensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8258080A JPS577538A (en) | 1980-06-18 | 1980-06-18 | Piezo-electric humidity sensor |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS577538A true JPS577538A (en) | 1982-01-14 |
JPS6255612B2 JPS6255612B2 (en) | 1987-11-20 |
Family
ID=13778411
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8258080A Granted JPS577538A (en) | 1980-06-18 | 1980-06-18 | Piezo-electric humidity sensor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS577538A (en) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60198445A (en) * | 1984-03-22 | 1985-10-07 | Shimada Phys & Chem Ind Co Ltd | Humidity sensor |
JPS61285675A (en) * | 1985-06-10 | 1986-12-16 | アメリカ合衆国 | Fuel battery integragted with steam modifier |
US5032365A (en) * | 1988-06-14 | 1991-07-16 | Mitsubishi Denki Kabushiki Kaisha | Reaction apparatus |
US5164163A (en) * | 1988-09-19 | 1992-11-17 | Kabushiki Kaisha Kobe Seiko Sho | Hydrocarbon reforming apparatus |
US5226928A (en) * | 1989-12-26 | 1993-07-13 | The Tokyo Electric Power Company, Incorporated | Reforming apparatus for hydrocarbon |
JP2007271449A (en) * | 2006-03-31 | 2007-10-18 | Kyocera Kinseki Corp | Qcm sensor element |
JP2011117972A (en) * | 2011-02-14 | 2011-06-16 | Seiko Epson Corp | Vibrator, vibrator array, and electronic apparatus |
-
1980
- 1980-06-18 JP JP8258080A patent/JPS577538A/en active Granted
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60198445A (en) * | 1984-03-22 | 1985-10-07 | Shimada Phys & Chem Ind Co Ltd | Humidity sensor |
JPH0345782B2 (en) * | 1984-03-22 | 1991-07-12 | Shimada Rika Kogyo Kk | |
JPS61285675A (en) * | 1985-06-10 | 1986-12-16 | アメリカ合衆国 | Fuel battery integragted with steam modifier |
US5032365A (en) * | 1988-06-14 | 1991-07-16 | Mitsubishi Denki Kabushiki Kaisha | Reaction apparatus |
US5164163A (en) * | 1988-09-19 | 1992-11-17 | Kabushiki Kaisha Kobe Seiko Sho | Hydrocarbon reforming apparatus |
US5226928A (en) * | 1989-12-26 | 1993-07-13 | The Tokyo Electric Power Company, Incorporated | Reforming apparatus for hydrocarbon |
JP2007271449A (en) * | 2006-03-31 | 2007-10-18 | Kyocera Kinseki Corp | Qcm sensor element |
JP2011117972A (en) * | 2011-02-14 | 2011-06-16 | Seiko Epson Corp | Vibrator, vibrator array, and electronic apparatus |
Also Published As
Publication number | Publication date |
---|---|
JPS6255612B2 (en) | 1987-11-20 |
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