JPS545878A - Film thickness monitoring device - Google Patents

Film thickness monitoring device

Info

Publication number
JPS545878A
JPS545878A JP7053377A JP7053377A JPS545878A JP S545878 A JPS545878 A JP S545878A JP 7053377 A JP7053377 A JP 7053377A JP 7053377 A JP7053377 A JP 7053377A JP S545878 A JPS545878 A JP S545878A
Authority
JP
Japan
Prior art keywords
film thickness
monitoring device
thickness monitoring
surface wave
wave elements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7053377A
Other languages
Japanese (ja)
Inventor
Yasuo Ehata
Masao Mashita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP7053377A priority Critical patent/JPS545878A/en
Publication of JPS545878A publication Critical patent/JPS545878A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/542—Controlling the film thickness or evaporation rate
    • C23C14/545—Controlling the film thickness or evaporation rate using measurement on deposited material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:To provide the subject device wherein in an oscillator using elastic surface wave elements, the film thickness is monitored by surface wave elements thereby measuring the film thickness with high precision and stably.
JP7053377A 1977-06-16 1977-06-16 Film thickness monitoring device Pending JPS545878A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7053377A JPS545878A (en) 1977-06-16 1977-06-16 Film thickness monitoring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7053377A JPS545878A (en) 1977-06-16 1977-06-16 Film thickness monitoring device

Publications (1)

Publication Number Publication Date
JPS545878A true JPS545878A (en) 1979-01-17

Family

ID=13434260

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7053377A Pending JPS545878A (en) 1977-06-16 1977-06-16 Film thickness monitoring device

Country Status (1)

Country Link
JP (1) JPS545878A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6093303A (en) * 1983-10-27 1985-05-25 Anelva Corp Quartz-type thickness monitor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6093303A (en) * 1983-10-27 1985-05-25 Anelva Corp Quartz-type thickness monitor
JPH0333203B2 (en) * 1983-10-27 1991-05-16 Anelva Corp

Similar Documents

Publication Publication Date Title
JPS5424062A (en) Ultrasonic type measuring apparatus
JPS5217851A (en) Super sonic transfer time measurement device
JPS545878A (en) Film thickness monitoring device
JPS5261987A (en) Ultrasonic detector
JPS51148341A (en) Logarithm function generator
JPS52104263A (en) Supersonic liquid level indicator
JPS52127359A (en) Electronic timepiece capable of giving multiplekind of indicatios
JPS5337396A (en) Crystal vibrator
JPS534577A (en) Electronic timepiece with buzzer means
JPS542088A (en) Composite piezo electric oscillator unit
JPS5441690A (en) Elastic surface wave unit
JPS5362964A (en) Elastic surface wave apparatus
JPS5284908A (en) Signal receiver
JPS522314A (en) Signal response unit
JPS5299046A (en) Elastic surface wave pulse delay device
DK44676A (en) DEVICE AT A WAVE-SHAPED PLATE ARRANGED TO BE INSIDE WITH A RUBBER AT THE WAVE TOP AND A METHOD FOR MANUFACTURE OF SUCH A PLATE
JPS5342857A (en) Alarm electronic watch
JPS5437517A (en) Receiver with timer
JPS52114372A (en) Approximating counter for use in time measurement
JPS531072A (en) Measuring apparatus for pulse photo energy
JPS52135771A (en) Portable electronic device
JPS52146666A (en) Electronic watch
JPS52132278A (en) Damping device due to visco-elastic substances
JPS52130367A (en) Electronic watch
JPS5299858A (en) Electronic apparatus