JPS6244453Y2 - - Google Patents

Info

Publication number
JPS6244453Y2
JPS6244453Y2 JP1981023231U JP2323181U JPS6244453Y2 JP S6244453 Y2 JPS6244453 Y2 JP S6244453Y2 JP 1981023231 U JP1981023231 U JP 1981023231U JP 2323181 U JP2323181 U JP 2323181U JP S6244453 Y2 JPS6244453 Y2 JP S6244453Y2
Authority
JP
Japan
Prior art keywords
connecting rod
sample
sample holder
guide tube
holding cylinder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1981023231U
Other languages
English (en)
Japanese (ja)
Other versions
JPS57136162U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1981023231U priority Critical patent/JPS6244453Y2/ja
Publication of JPS57136162U publication Critical patent/JPS57136162U/ja
Application granted granted Critical
Publication of JPS6244453Y2 publication Critical patent/JPS6244453Y2/ja
Expired legal-status Critical Current

Links

JP1981023231U 1981-02-20 1981-02-20 Expired JPS6244453Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1981023231U JPS6244453Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1981-02-20 1981-02-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1981023231U JPS6244453Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1981-02-20 1981-02-20

Publications (2)

Publication Number Publication Date
JPS57136162U JPS57136162U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1982-08-25
JPS6244453Y2 true JPS6244453Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-11-24

Family

ID=29820995

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1981023231U Expired JPS6244453Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1981-02-20 1981-02-20

Country Status (1)

Country Link
JP (1) JPS6244453Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000016371A1 (fr) * 1998-09-16 2000-03-23 Hitachi, Ltd. Equipement d'exploitation d'un faisceau

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4357291B2 (ja) * 2003-12-26 2009-11-04 株式会社日立ハイテクノロジーズ サイドエントリ型試料移動機構を備えた荷電粒子線装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4999265A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1973-01-25 1974-09-19
JPS5590044A (en) * 1978-12-28 1980-07-08 Jeol Ltd Sample holder for electronic microscope, etc.

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000016371A1 (fr) * 1998-09-16 2000-03-23 Hitachi, Ltd. Equipement d'exploitation d'un faisceau

Also Published As

Publication number Publication date
JPS57136162U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1982-08-25

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