JPS57136162U - - Google Patents

Info

Publication number
JPS57136162U
JPS57136162U JP2323181U JP2323181U JPS57136162U JP S57136162 U JPS57136162 U JP S57136162U JP 2323181 U JP2323181 U JP 2323181U JP 2323181 U JP2323181 U JP 2323181U JP S57136162 U JPS57136162 U JP S57136162U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2323181U
Other languages
Japanese (ja)
Other versions
JPS6244453Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1981023231U priority Critical patent/JPS6244453Y2/ja
Publication of JPS57136162U publication Critical patent/JPS57136162U/ja
Application granted granted Critical
Publication of JPS6244453Y2 publication Critical patent/JPS6244453Y2/ja
Expired legal-status Critical Current

Links

JP1981023231U 1981-02-20 1981-02-20 Expired JPS6244453Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1981023231U JPS6244453Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1981-02-20 1981-02-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1981023231U JPS6244453Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1981-02-20 1981-02-20

Publications (2)

Publication Number Publication Date
JPS57136162U true JPS57136162U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1982-08-25
JPS6244453Y2 JPS6244453Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-11-24

Family

ID=29820995

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1981023231U Expired JPS6244453Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1981-02-20 1981-02-20

Country Status (1)

Country Link
JP (1) JPS6244453Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005197003A (ja) * 2003-12-26 2005-07-21 Hitachi High-Technologies Corp サイドエントリ型試料移動機構を備えた荷電粒子線装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000016371A1 (fr) * 1998-09-16 2000-03-23 Hitachi, Ltd. Equipement d'exploitation d'un faisceau

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4999265A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1973-01-25 1974-09-19
JPS5590044A (en) * 1978-12-28 1980-07-08 Jeol Ltd Sample holder for electronic microscope, etc.

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4999265A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1973-01-25 1974-09-19
JPS5590044A (en) * 1978-12-28 1980-07-08 Jeol Ltd Sample holder for electronic microscope, etc.

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005197003A (ja) * 2003-12-26 2005-07-21 Hitachi High-Technologies Corp サイドエントリ型試料移動機構を備えた荷電粒子線装置

Also Published As

Publication number Publication date
JPS6244453Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-11-24

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