JPS6243152A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS6243152A
JPS6243152A JP18442285A JP18442285A JPS6243152A JP S6243152 A JPS6243152 A JP S6243152A JP 18442285 A JP18442285 A JP 18442285A JP 18442285 A JP18442285 A JP 18442285A JP S6243152 A JPS6243152 A JP S6243152A
Authority
JP
Japan
Prior art keywords
aluminum
semiconductor device
layer
wiring layer
wiring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18442285A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0573059B2 (enrdf_load_html_response
Inventor
Shigeru Harada
繁 原田
Shingo Ikeda
池田　慎悟
Isao Furuta
古田　勲
Katsuhiro Hirata
勝弘 平田
Mitsuyoshi Nakamura
充善 中村
Takeshi Noguchi
武志 野口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP18442285A priority Critical patent/JPS6243152A/ja
Publication of JPS6243152A publication Critical patent/JPS6243152A/ja
Publication of JPH0573059B2 publication Critical patent/JPH0573059B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Local Oxidation Of Silicon (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP18442285A 1985-08-20 1985-08-20 半導体装置の製造方法 Granted JPS6243152A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18442285A JPS6243152A (ja) 1985-08-20 1985-08-20 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18442285A JPS6243152A (ja) 1985-08-20 1985-08-20 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS6243152A true JPS6243152A (ja) 1987-02-25
JPH0573059B2 JPH0573059B2 (enrdf_load_html_response) 1993-10-13

Family

ID=16152880

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18442285A Granted JPS6243152A (ja) 1985-08-20 1985-08-20 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS6243152A (enrdf_load_html_response)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5269878A (en) * 1992-12-10 1993-12-14 Vlsi Technology, Inc. Metal patterning with dechlorinization in integrated circuit manufacture

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4940688A (enrdf_load_html_response) * 1972-08-24 1974-04-16
JPS58216442A (ja) * 1982-06-09 1983-12-16 Fujitsu Ltd アルミニウム配線の形成方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4940688A (enrdf_load_html_response) * 1972-08-24 1974-04-16
JPS58216442A (ja) * 1982-06-09 1983-12-16 Fujitsu Ltd アルミニウム配線の形成方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5269878A (en) * 1992-12-10 1993-12-14 Vlsi Technology, Inc. Metal patterning with dechlorinization in integrated circuit manufacture

Also Published As

Publication number Publication date
JPH0573059B2 (enrdf_load_html_response) 1993-10-13

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