JPS6242383B2 - - Google Patents
Info
- Publication number
- JPS6242383B2 JPS6242383B2 JP56184776A JP18477681A JPS6242383B2 JP S6242383 B2 JPS6242383 B2 JP S6242383B2 JP 56184776 A JP56184776 A JP 56184776A JP 18477681 A JP18477681 A JP 18477681A JP S6242383 B2 JPS6242383 B2 JP S6242383B2
- Authority
- JP
- Japan
- Prior art keywords
- alumina
- layer
- insulating film
- forming
- scribe line
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Dicing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56184776A JPS5886742A (ja) | 1981-11-18 | 1981-11-18 | 半導体装置の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56184776A JPS5886742A (ja) | 1981-11-18 | 1981-11-18 | 半導体装置の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5886742A JPS5886742A (ja) | 1983-05-24 |
| JPS6242383B2 true JPS6242383B2 (enExample) | 1987-09-08 |
Family
ID=16159104
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56184776A Granted JPS5886742A (ja) | 1981-11-18 | 1981-11-18 | 半導体装置の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5886742A (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6387743A (ja) * | 1986-09-30 | 1988-04-19 | Mitsubishi Electric Corp | 半導体装置の製造方法 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3827949A (en) * | 1972-03-29 | 1974-08-06 | Ibm | Anodic oxide passivated planar aluminum metallurgy system and method of producing |
| JPS5270771A (en) * | 1975-12-10 | 1977-06-13 | Toshiba Corp | Position matching method |
| JPS5648147A (en) * | 1979-09-26 | 1981-05-01 | Nec Corp | Semiconductor device |
-
1981
- 1981-11-18 JP JP56184776A patent/JPS5886742A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5886742A (ja) | 1983-05-24 |
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