JPS6240830U - - Google Patents
Info
- Publication number
- JPS6240830U JPS6240830U JP13004085U JP13004085U JPS6240830U JP S6240830 U JPS6240830 U JP S6240830U JP 13004085 U JP13004085 U JP 13004085U JP 13004085 U JP13004085 U JP 13004085U JP S6240830 U JPS6240830 U JP S6240830U
- Authority
- JP
- Japan
- Prior art keywords
- sink
- processing apparatus
- wet processing
- drain pipe
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000126 substance Substances 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
- 238000004140 cleaning Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
Description
第１図は本考案の一実施例を示すウエツト処理
装置の構造概略図、第２図は従来のウエツト処理
装置を示す構造概略図である。
１…薬液槽、２…第１洗浄槽、３…第２洗浄槽
、６…流し部、７…排水管（ＣＯＮＣ）、８…排
水管（ＤＩＬＶＴＥ）、９…排水弁。
FIG. 1 is a schematic structural diagram of a wet processing apparatus showing an embodiment of the present invention, and FIG. 2 is a structural schematic diagram showing a conventional wet processing apparatus. 1... Chemical solution tank, 2... First cleaning tank, 3... Second cleaning tank, 6... Sink section, 7... Drain pipe (CONC), 8... Drain pipe (DILVTE), 9... Drain valve.
Claims (1)
管のうち、薬液槽側の排水管の開口部を前記流し
部より一定高さに突出させたことを特徴とする半
導体ウエハのウエツト処理装置。 A wet processing apparatus for semiconductor wafers, characterized in that, among drain pipes provided in a sink forming the bottom surface of the entire apparatus, the opening of the drain pipe on the chemical tank side protrudes from the sink at a constant height.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13004085U JPS6240830U (en) | 1985-08-28 | 1985-08-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13004085U JPS6240830U (en) | 1985-08-28 | 1985-08-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6240830U true JPS6240830U (en) | 1987-03-11 |
Family
ID=31027161
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13004085U Pending JPS6240830U (en) | 1985-08-28 | 1985-08-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6240830U (en) |
-
1985
- 1985-08-28 JP JP13004085U patent/JPS6240830U/ja active Pending
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