JPS61182032U - - Google Patents
Info
- Publication number
- JPS61182032U JPS61182032U JP6645385U JP6645385U JPS61182032U JP S61182032 U JPS61182032 U JP S61182032U JP 6645385 U JP6645385 U JP 6645385U JP 6645385 U JP6645385 U JP 6645385U JP S61182032 U JPS61182032 U JP S61182032U
- Authority
- JP
- Japan
- Prior art keywords
- cleaning
- arm
- scoop plate
- cleaning device
- solution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 9
- 238000010586 diagram Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
Description
第１図はこの考案の一実施例を示す説明図、第
２図は従来のウエハ洗浄装置の説明図である。
図において、１は薬液槽、２は薬液、３はウエ
ハ、５は純水槽、６は純水、７はアーム、８はす
くい板、１０は洗浄装置である。なお、各図中同
一符号は同一または相当部分を示す。
FIG. 1 is an explanatory diagram showing an embodiment of this invention, and FIG. 2 is an explanatory diagram of a conventional wafer cleaning apparatus. In the figure, 1 is a chemical tank, 2 is a chemical solution, 3 is a wafer, 5 is a pure water tank, 6 is pure water, 7 is an arm, 8 is a scoop plate, and 10 is a cleaning device. Note that the same reference numerals in each figure indicate the same or corresponding parts.
Claims (1)
のように設け、このアームの下部に前記洗浄液の
表面部分をすくい取るすくい板を設け、前記洗浄
槽外にこのすくい板を洗浄する洗浄装置を設けた
ことを特徴とするウエハ洗浄装置。 An arm is provided like a pendulum above the cleaning tank containing the cleaning solution, a scoop plate is provided at the bottom of the arm for scooping the surface portion of the cleaning solution, and a cleaning device for cleaning the scoop plate is provided outside the cleaning tank. A wafer cleaning device characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6645385U JPS61182032U (en) | 1985-05-07 | 1985-05-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6645385U JPS61182032U (en) | 1985-05-07 | 1985-05-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61182032U true JPS61182032U (en) | 1986-11-13 |
Family
ID=30599368
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6645385U Pending JPS61182032U (en) | 1985-05-07 | 1985-05-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61182032U (en) |
-
1985
- 1985-05-07 JP JP6645385U patent/JPS61182032U/ja active Pending
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