JPS6393634U - - Google Patents
Info
- Publication number
- JPS6393634U JPS6393634U JP18784986U JP18784986U JPS6393634U JP S6393634 U JPS6393634 U JP S6393634U JP 18784986 U JP18784986 U JP 18784986U JP 18784986 U JP18784986 U JP 18784986U JP S6393634 U JPS6393634 U JP S6393634U
- Authority
- JP
- Japan
- Prior art keywords
- heat
- vinyl chloride
- chloride resin
- resistant vinyl
- treatment device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 claims 3
- 239000011347 resin Substances 0.000 claims 3
- 229920005989 resin Polymers 0.000 claims 3
- 239000000463 material Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000003466 welding Methods 0.000 claims 1
- 239000002023 wood Substances 0.000 claims 1
- 238000005406 washing Methods 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Weting (AREA)
Description
第１図はこの考案のウエツト装置の一実施例の
正面図、第２図は第１図のＡ―Ａ′線から見た側
面図、第３図は同上実施例における流し部の拡大
斜視図、第４図は従来のウエツト処理装置の正面
図である。
１…高温薬液槽、２…洗浄槽、４…排液弁、５
…流し部、６…排液パイプ、１１…弗素樹脂。
Fig. 1 is a front view of one embodiment of the wet device of this invention, Fig. 2 is a side view taken from line AA' in Fig. 1, and Fig. 3 is an enlarged perspective view of the sink in the same embodiment. , FIG. 4 is a front view of a conventional wet treatment apparatus. 1...High temperature chemical tank, 2...Washing tank, 4...Drain valve, 5
...Sink part, 6...Drainage pipe, 11...Fluororesin.
Claims (1)
体の底面を成す流し部を耐熱塩化ビニール樹脂で
形成し、 (b) この耐熱塩化ビニール樹脂の内面に弗素
樹脂材で内槽を形成し、 てなることを特徴とするウエツト処理装置。 (2) 弗素樹脂材で形成した内槽は耐熱塩化ビニ
ール樹脂に溶接加工を施したことを特徴とする実
用新案登録請求の範囲第１項記載のウエツト処理
装置。[Scope of Claim for Utility Model Registration] (1) (a) The sink portion forming the entire bottom of the semiconductor wafer wet processing equipment is formed of heat-resistant vinyl chloride resin, and (b) The inner surface of the heat-resistant vinyl chloride resin is coated with fluororesin. A wet treatment device characterized by having an inner tank made of wood. (2) The wet treatment device according to claim 1, wherein the inner tank is made of a fluororesin material and is made of heat-resistant vinyl chloride resin by welding.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18784986U JPS6393634U (en) | 1986-12-08 | 1986-12-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18784986U JPS6393634U (en) | 1986-12-08 | 1986-12-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6393634U true JPS6393634U (en) | 1988-06-17 |
Family
ID=31138684
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18784986U Pending JPS6393634U (en) | 1986-12-08 | 1986-12-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6393634U (en) |
-
1986
- 1986-12-08 JP JP18784986U patent/JPS6393634U/ja active Pending