JPH0252437U - - Google Patents
Info
- Publication number
- JPH0252437U JPH0252437U JP13114488U JP13114488U JPH0252437U JP H0252437 U JPH0252437 U JP H0252437U JP 13114488 U JP13114488 U JP 13114488U JP 13114488 U JP13114488 U JP 13114488U JP H0252437 U JPH0252437 U JP H0252437U
- Authority
- JP
- Japan
- Prior art keywords
- pure water
- pipe
- tank
- metering tank
- heater
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims description 2
- 238000012993 chemical processing Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
Landscapes
- Weting (AREA)
Description
第１図Ａは本考案の一実施例の断面図、第１図
Ｂ，Ｃはそれぞれ該一実施例の側面図及び平面図
である。第２図Ａは従来の純水加熱定量槽の断面
図、第２図Ｂは従来の他の純水加熱定量槽の断面
図である。
１……加熱定量槽、２……ヒーター、３……パ
イプ、４……外槽。
FIG. 1A is a sectional view of an embodiment of the present invention, and FIGS. 1B and 1C are a side view and a plan view, respectively, of the embodiment. FIG. 2A is a sectional view of a conventional pure water heated quantitative tank, and FIG. 2B is a sectional view of another conventional pure water heated quantitative tank. 1... heating quantitative tank, 2... heater, 3... pipe, 4... outer tank.
Claims (1)
の加熱定量槽において、前記定量槽の一側面から
他側面まで底面に平行にパイプを設け、前記パイ
プ内にヒーターを挿入して純水を加熱することを
特徴とする純水加熱定量槽。 In a heated metering tank for pure water used in a chemical processing device for semiconductor wafers, a pipe is provided parallel to the bottom from one side of the metering tank to the other side, and a heater is inserted into the pipe to heat the pure water. Pure water heating quantitative tank featuring:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13114488U JPH0252437U (en) | 1988-10-05 | 1988-10-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13114488U JPH0252437U (en) | 1988-10-05 | 1988-10-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0252437U true JPH0252437U (en) | 1990-04-16 |
Family
ID=31386937
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13114488U Pending JPH0252437U (en) | 1988-10-05 | 1988-10-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0252437U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5740315A (en) * | 1992-06-30 | 1998-04-14 | Kabushiki Kaisha Komatsu Seisakusho | Fluid heating apparatus |
-
1988
- 1988-10-05 JP JP13114488U patent/JPH0252437U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5740315A (en) * | 1992-06-30 | 1998-04-14 | Kabushiki Kaisha Komatsu Seisakusho | Fluid heating apparatus |
| DE4392931B4 (en) * | 1992-06-30 | 2008-02-14 | Kabushiki Kaisha Komatsu Seisakusho | fluid heating device |
| DE4392931B8 (en) * | 1992-06-30 | 2008-09-11 | Kabushiki Kaisha Komatsu Seisakusho | fluid heating device |