JPS62138438U - - Google Patents
Info
- Publication number
- JPS62138438U JPS62138438U JP2492586U JP2492586U JPS62138438U JP S62138438 U JPS62138438 U JP S62138438U JP 2492586 U JP2492586 U JP 2492586U JP 2492586 U JP2492586 U JP 2492586U JP S62138438 U JPS62138438 U JP S62138438U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor
- replaceable
- quartz boat
- heat treatment
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010453 quartz Substances 0.000 claims description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 2
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
Description
第１図は本考案の石英ボートの正面図、第２図
は第１図の上面図、第３図は第１図の側面図、第
４図は従来の石英ボートの正面図である。
１…交換可能な石英部分、２…一体化された石
英部分、３…接合部、４…従来の一体型の石英ボ
ート。
FIG. 1 is a front view of the quartz boat of the present invention, FIG. 2 is a top view of FIG. 1, FIG. 3 is a side view of FIG. 1, and FIG. 4 is a front view of a conventional quartz boat. 1...Replaceable quartz part, 2...Integrated quartz part, 3...Joint part, 4...Conventional integrated quartz boat.
Claims (1)
用される石英ボートの一部を交換可能としたこと
を特徴とする半導体製造装置。 A semiconductor manufacturing device characterized in that a part of a quartz boat used in a heat treatment process in a semiconductor device manufacturing process is replaceable.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2492586U JPS62138438U (en) | 1986-02-21 | 1986-02-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2492586U JPS62138438U (en) | 1986-02-21 | 1986-02-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62138438U true JPS62138438U (en) | 1987-09-01 |
Family
ID=30824596
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2492586U Pending JPS62138438U (en) | 1986-02-21 | 1986-02-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62138438U (en) |
-
1986
- 1986-02-21 JP JP2492586U patent/JPS62138438U/ja active Pending