JPS6364032U - - Google Patents
Info
- Publication number
- JPS6364032U JPS6364032U JP15853286U JP15853286U JPS6364032U JP S6364032 U JPS6364032 U JP S6364032U JP 15853286 U JP15853286 U JP 15853286U JP 15853286 U JP15853286 U JP 15853286U JP S6364032 U JPS6364032 U JP S6364032U
- Authority
- JP
- Japan
- Prior art keywords
- cleaning
- developer
- developing device
- liquid tank
- photoresist film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 2
- 238000004140 cleaning Methods 0.000 claims 3
- 229920002120 photoresistant polymer Polymers 0.000 claims 2
Description
第１図は、本考案に係る現像装置の一実施例を
示す概略側面図、第２図は、従来の現像装置の一
例を示す概略側面図である。
Ｗ……半導体ウエーハ、１０……液槽、１２…
…ターンテーブル。
FIG. 1 is a schematic side view showing an embodiment of a developing device according to the present invention, and FIG. 2 is a schematic side view showing an example of a conventional developing device. W...Semiconductor wafer, 10...Liquid tank, 12...
…Turntable.
Claims (1)
装置であつて、 現像液あるいは洗浄液が供給される液槽と、 上記液槽の上方に配設され、上記半導体ウエー
ハをフオトレジスト膜を下方に向けた状態で保持
するターンテーブルとからなり、 上記フオトレジスト膜を液槽の現像液あるいは
洗浄液の略液面で現像あるいは洗浄処理すること
を特徴とする現像装置。[Scope of Claim for Utility Model Registration] A developing device for a photoresist film on the surface of a semiconductor wafer, comprising: a liquid tank to which a developer or a cleaning liquid is supplied; A developing device comprising a turntable that holds the film facing downward, and developing or cleaning the photoresist film at substantially the level of a developer or cleaning solution in a liquid tank.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15853286U JPS6364032U (en) | 1986-10-15 | 1986-10-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15853286U JPS6364032U (en) | 1986-10-15 | 1986-10-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6364032U true JPS6364032U (en) | 1988-04-27 |
Family
ID=31082109
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15853286U Pending JPS6364032U (en) | 1986-10-15 | 1986-10-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6364032U (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5655048A (en) * | 1979-10-11 | 1981-05-15 | Matsushita Electric Ind Co Ltd | Developing method and device therefor |
| JPS62102534A (en) * | 1985-10-29 | 1987-05-13 | Kurotani Nobuko | Processor for semiconductor material |
| JPS62269316A (en) * | 1986-05-19 | 1987-11-21 | Kurotani Iwao | Processor for develoment of semiconductor material |
-
1986
- 1986-10-15 JP JP15853286U patent/JPS6364032U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5655048A (en) * | 1979-10-11 | 1981-05-15 | Matsushita Electric Ind Co Ltd | Developing method and device therefor |
| JPS62102534A (en) * | 1985-10-29 | 1987-05-13 | Kurotani Nobuko | Processor for semiconductor material |
| JPS62269316A (en) * | 1986-05-19 | 1987-11-21 | Kurotani Iwao | Processor for develoment of semiconductor material |
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