JPS63102232U - - Google Patents
Info
- Publication number
- JPS63102232U JPS63102232U JP20267586U JP20267586U JPS63102232U JP S63102232 U JPS63102232 U JP S63102232U JP 20267586 U JP20267586 U JP 20267586U JP 20267586 U JP20267586 U JP 20267586U JP S63102232 U JPS63102232 U JP S63102232U
- Authority
- JP
- Japan
- Prior art keywords
- etching
- heating
- etching apparatus
- etching liquid
- semiconductor wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005530 etching Methods 0.000 claims description 9
- 239000007788 liquid Substances 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 2
Landscapes
- Weting (AREA)
Description
第1図は本考案のエツチング装置における断面
図、第2図は本考案の実施例2の断面図、第3図
は従来の装置の断面図であり、aはエツチング槽
内に加熱ヒーターがある場合、bは配管系の途中
に加熱ヒーターがある場合の断面図である。
1……半導体ウエハー、2……キヤリア、3…
…エツチング槽、4……エツチング液、5……フ
イルター、6……加熱ヒーター、7……配管、8
……循環用ポンプ、9……エツチング槽、10…
…貯液タンク。
Fig. 1 is a cross-sectional view of the etching apparatus of the present invention, Fig. 2 is a cross-sectional view of Embodiment 2 of the present invention, and Fig. 3 is a cross-sectional view of a conventional apparatus. In this case, b is a cross-sectional view when there is a heater in the middle of the piping system. 1...Semiconductor wafer, 2...Carrier, 3...
...Etching tank, 4...Etching liquid, 5...Filter, 6...Heating heater, 7...Piping, 8
...Circulation pump, 9...Etching tank, 10...
...Liquid storage tank.
Claims (1)
置においてエツチング液用フイルターとエツチン
グ液を加熱する加熱ヒーターを一体化したことを
特徴とする半導体ウエハーエツチング装置。 A semiconductor wafer etching apparatus for etching semiconductor wafers, characterized in that an etching liquid filter and a heating heater for heating the etching liquid are integrated in the etching apparatus.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20267586U JPS63102232U (en) | 1986-12-23 | 1986-12-23 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20267586U JPS63102232U (en) | 1986-12-23 | 1986-12-23 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63102232U true JPS63102232U (en) | 1988-07-02 |
Family
ID=31167284
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP20267586U Pending JPS63102232U (en) | 1986-12-23 | 1986-12-23 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63102232U (en) |
-
1986
- 1986-12-23 JP JP20267586U patent/JPS63102232U/ja active Pending
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