JPH0186232U - - Google Patents
Info
- Publication number
- JPH0186232U JPH0186232U JP18250187U JP18250187U JPH0186232U JP H0186232 U JPH0186232 U JP H0186232U JP 18250187 U JP18250187 U JP 18250187U JP 18250187 U JP18250187 U JP 18250187U JP H0186232 U JPH0186232 U JP H0186232U
- Authority
- JP
- Japan
- Prior art keywords
- flushing tank
- water supply
- flushing
- closes
- opens
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 7
- 238000005406 washing Methods 0.000 claims description 3
- 238000011010 flushing procedure Methods 0.000 claims 6
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Description
第１図は本考案の実施例１を示す断面図、第２
図は従来の水洗装置を示す図、第３図は本考案の
実施例２を示す断面図である。
１…水洗槽、２…排水口、３，３ａ…排水弁、
３ｂ…排水弁機構部、４…給水口、５…給水弁、
６…キヤリア、７…半導体ウエハー、８…排水配
管。
Fig. 1 is a sectional view showing the first embodiment of the present invention;
The figure shows a conventional water washing device, and FIG. 3 is a sectional view showing a second embodiment of the present invention. 1...Washing tank, 2...Drain port, 3, 3a...Drain valve,
3b...Drain valve mechanism section, 4...Water supply port, 5...Water supply valve,
6...Carrier, 7...Semiconductor wafer, 8...Drainage piping.
Claims (1)
及び該水洗槽の給水口を開閉する給水弁とを具備
する水洗装置において、水洗槽の底部構造を逆円
錐状とし、その逆円錐状の底部に排水口を、また
傾斜部に給水口を設けたことを特徴とする水洗装
置。 In a flushing device comprising a flushing tank, a drain valve that opens and closes a drain port of the flushing tank, and a water supply valve that opens and closes a water supply port of the flushing tank, the bottom structure of the flushing tank has an inverted conical shape, and the bottom structure of the flushing tank has an inverted conical shape. A water washing device characterized by having a drain port at the bottom and a water supply port at the sloping part.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18250187U JPH0186232U (en) | 1987-11-30 | 1987-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18250187U JPH0186232U (en) | 1987-11-30 | 1987-11-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0186232U true JPH0186232U (en) | 1989-06-07 |
Family
ID=31473948
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18250187U Pending JPH0186232U (en) | 1987-11-30 | 1987-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0186232U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002224627A (en) * | 2001-02-05 | 2002-08-13 | Tokyo Electron Ltd | Method and apparatus for cleaning substrate |
-
1987
- 1987-11-30 JP JP18250187U patent/JPH0186232U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002224627A (en) * | 2001-02-05 | 2002-08-13 | Tokyo Electron Ltd | Method and apparatus for cleaning substrate |