JPH01154631U - - Google Patents
Info
- Publication number
- JPH01154631U JPH01154631U JP5199288U JP5199288U JPH01154631U JP H01154631 U JPH01154631 U JP H01154631U JP 5199288 U JP5199288 U JP 5199288U JP 5199288 U JP5199288 U JP 5199288U JP H01154631 U JPH01154631 U JP H01154631U
- Authority
- JP
- Japan
- Prior art keywords
- tank
- pure water
- inner tank
- water supply
- outer tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 3
- 238000005406 washing Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 1
Landscapes
- Weting (AREA)
Description
第１図は本考案の一実施例を示す構成図、第２
図は従来の水洗槽を示す構成図である。
１……内槽、２……給水口、３……排水口、４
……外槽、５……ウエハー、６……キヤリアー、
７……パーテイクル。
Fig. 1 is a configuration diagram showing one embodiment of the present invention;
The figure is a configuration diagram showing a conventional washing tank. 1... Inner tank, 2... Water supply port, 3... Drain port, 4
...outer tank, 5...wafer, 6...carrier,
7... Particle.
Claims (1)
の給水口を設け、外槽から内槽にオーバーフロー
した純水を排水する排水口を内槽に設けたことを
特徴とする水洗槽。 1. A washing tank having a double tank structure (inside and outside), characterized in that the outer tank is provided with a pure water supply port, and the inner tank is provided with a drain port for draining pure water overflowing from the outer tank into the inner tank.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5199288U JPH01154631U (en) | 1988-04-18 | 1988-04-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5199288U JPH01154631U (en) | 1988-04-18 | 1988-04-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01154631U true JPH01154631U (en) | 1989-10-24 |
Family
ID=31278005
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5199288U Pending JPH01154631U (en) | 1988-04-18 | 1988-04-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01154631U (en) |
-
1988
- 1988-04-18 JP JP5199288U patent/JPH01154631U/ja active Pending
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