JPS6196539U - - Google Patents
Info
- Publication number
- JPS6196539U JPS6196539U JP18170784U JP18170784U JPS6196539U JP S6196539 U JPS6196539 U JP S6196539U JP 18170784 U JP18170784 U JP 18170784U JP 18170784 U JP18170784 U JP 18170784U JP S6196539 U JPS6196539 U JP S6196539U
- Authority
- JP
- Japan
- Prior art keywords
- drain port
- semiconductor
- closing
- valve body
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 2
- 239000000126 substance Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
- 239000007788 liquid Substances 0.000 description 3
Landscapes
- Weting (AREA)
Description
第１図、第２図は本考案の一実施例を示すもの
で、第１図は貯液時を示す断面図、第２図は排液
時を示す断面図、第３図Ａ，Ｂは従来例を示す断
面図である。
１…槽、１ａ…排液口、７…弁板。
Figures 1 and 2 show an embodiment of the present invention; Figure 1 is a cross-sectional view when liquid is stored, Figure 2 is a cross-sectional view when liquid is drained, and Figures A and B are cross-sectional views when liquid is drained. FIG. 2 is a sectional view showing a conventional example. 1...tank, 1a...drain port, 7...valve plate.
Claims (1)
底部に直接排液口を開口し、該排液口を開閉する
弁体を備えたことを特徴とする半導体処理装置。 1. A semiconductor processing apparatus, comprising: a drain port opened directly at the bottom of a tank used for chemical wet processing of semiconductor wafers; and a valve body for opening and closing the drain port.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18170784U JPS6196539U (en) | 1984-11-30 | 1984-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18170784U JPS6196539U (en) | 1984-11-30 | 1984-11-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6196539U true JPS6196539U (en) | 1986-06-21 |
Family
ID=30739248
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18170784U Pending JPS6196539U (en) | 1984-11-30 | 1984-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6196539U (en) |
-
1984
- 1984-11-30 JP JP18170784U patent/JPS6196539U/ja active Pending
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