JPH0392033U - - Google Patents
Info
- Publication number
- JPH0392033U JPH0392033U JP15101089U JP15101089U JPH0392033U JP H0392033 U JPH0392033 U JP H0392033U JP 15101089 U JP15101089 U JP 15101089U JP 15101089 U JP15101089 U JP 15101089U JP H0392033 U JPH0392033 U JP H0392033U
- Authority
- JP
- Japan
- Prior art keywords
- opening
- tank
- closing
- washing
- closing plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005406 washing Methods 0.000 claims description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Description
第１図は本考案一実施例の半導体ウエーハの水
洗装置の斜視図、第２図ａ〜ｃは第１図の装置の
動作容量を説明する縦断面図である。第３図ａ〜
ｃは従来の水洗装置の動作要領を説明する縦断面
図である。
１……水洗槽、２……給水口、３……開口部、
４……開閉板（ゲート）、５……キヤリア、６…
…ウエーハ、７……純水、８……オーバーフロー
。
FIG. 1 is a perspective view of a semiconductor wafer washing apparatus according to an embodiment of the present invention, and FIGS. 2 a to 2 c are longitudinal sectional views illustrating the operating capacity of the apparatus shown in FIG. 1. Figure 3 a~
c is a vertical cross-sectional view illustrating the operation procedure of a conventional water washing device. 1...Washing tank, 2...Water inlet, 3...Opening,
4... Opening/closing plate (gate), 5... Carrier, 6...
...Wafer, 7...Pure water, 8...Overflow.
Claims (1)
開口部を開閉する開閉板を設けるとともに、槽底
部に給水口を設けたことを特徴とする半導体ウエ
ーハの水洗装置。 A washing device for semiconductor wafers, characterized in that an opening serving as a drainage port is provided on the upper wall of the washing tank, an opening/closing plate is provided for opening and closing this opening, and a water supply port is provided at the bottom of the tank.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15101089U JPH0392033U (en) | 1989-12-29 | 1989-12-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15101089U JPH0392033U (en) | 1989-12-29 | 1989-12-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0392033U true JPH0392033U (en) | 1991-09-19 |
Family
ID=31697328
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15101089U Pending JPH0392033U (en) | 1989-12-29 | 1989-12-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0392033U (en) |
-
1989
- 1989-12-29 JP JP15101089U patent/JPH0392033U/ja active Pending