JPS6183032U - - Google Patents

Info

Publication number
JPS6183032U
JPS6183032U JP16759184U JP16759184U JPS6183032U JP S6183032 U JPS6183032 U JP S6183032U JP 16759184 U JP16759184 U JP 16759184U JP 16759184 U JP16759184 U JP 16759184U JP S6183032 U JPS6183032 U JP S6183032U
Authority
JP
Japan
Prior art keywords
pure water
semiconductor wafers
cleaning
utility
registration request
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16759184U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16759184U priority Critical patent/JPS6183032U/ja
Publication of JPS6183032U publication Critical patent/JPS6183032U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本考案の一実施例による洗浄装置の断
面図である。 １……水洗槽、２……バブリング用窒素配管、
３……オーバーフロー用純水供給口、４……キヤ
リア固定用テフロン製ハンガー、５……金属製ア
ーム、６……カム、７……排気ダクト、８……キ
ヤリア。 FIG. 1 is a sectional view of a cleaning device according to an embodiment of the present invention. 1...Washing tank, 2...Nitrogen piping for bubbling,
3...Pure water supply port for overflow, 4...Teflon hanger for fixing the carrier, 5...Metal arm, 6...Cam, 7...Exhaust duct, 8...Carrier.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 半導体ウエーハの純水洗浄において、ウエーハ
キヤリア本体に機械的な上下振動を与えることを
特徴とする半導体ウエーハの純水洗浄装置。 A device for cleaning semiconductor wafers with pure water, which is characterized by applying mechanical vertical vibration to a wafer carrier body during cleaning of semiconductor wafers with pure water.
JP16759184U 1984-11-05 1984-11-05 Pending JPS6183032U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16759184U JPS6183032U (en) 1984-11-05 1984-11-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16759184U JPS6183032U (en) 1984-11-05 1984-11-05

Publications (1)

Publication Number Publication Date
JPS6183032U true JPS6183032U (en) 1986-06-02

Family

ID=30725380

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16759184U Pending JPS6183032U (en) 1984-11-05 1984-11-05

Country Status (1)

Country Link
JP (1) JPS6183032U (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62202393U (en) * 1986-06-12 1987-12-23
JPH01199432A (en) * 1987-09-09 1989-08-10 Orr Robert F Method and apparatus for washing , rinsing and drying silicon wafer
JPH0291339U (en) * 1989-01-05 1990-07-19

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62202393U (en) * 1986-06-12 1987-12-23
JPH01199432A (en) * 1987-09-09 1989-08-10 Orr Robert F Method and apparatus for washing , rinsing and drying silicon wafer
JPH0291339U (en) * 1989-01-05 1990-07-19

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