JPH0335U - - Google Patents
Info
- Publication number
- JPH0335U JPH0335U JP5723789U JP5723789U JPH0335U JP H0335 U JPH0335 U JP H0335U JP 5723789 U JP5723789 U JP 5723789U JP 5723789 U JP5723789 U JP 5723789U JP H0335 U JPH0335 U JP H0335U
- Authority
- JP
- Japan
- Prior art keywords
- carrier
- wafers
- holder
- cleaning
- cleaning tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 5
- 238000004140 cleaning Methods 0.000 claims 4
- 235000012431 wafers Nutrition 0.000 claims 3
- 239000007921 spray Substances 0.000 claims 1
- 230000010355 oscillation Effects 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Description
第１図は本考案の実施例１を示す断面図、第２
図は本考案の実施例２を示す断面図である。
１…給液口、２…ホルダ、３…超音波発振板、
４…槽、５…キヤリア、６…ウエハ、７…配管、
８…吐出口、９…給液板、１０…給液口、１１…
排液口。
Fig. 1 is a sectional view showing the first embodiment of the present invention;
The figure is a sectional view showing a second embodiment of the present invention. 1...Liquid supply port, 2...Holder, 3...Ultrasonic oscillation plate,
4...tank, 5...carrier, 6...wafer, 7...piping,
8...Discharge port, 9...Liquid supply plate, 10...Liquid supply port, 11...
Drain port.
Claims (1)
キヤリアを保持し該キヤリア内のウエハを洗浄槽
内に浸漬させるホルダと、前記ホルダに取付けら
れキヤリア内のウエハに向けて洗浄液を噴出する
給液口とを有することを特徴とするメガソニツク
洗浄装置。 A cleaning tank equipped with an ultrasonic diaphragm, a holder that holds a carrier for storing wafers and immerses the wafers in the carrier into the cleaning tank, and a supply that is attached to the holder and sprays cleaning liquid toward the wafers in the carrier. A megasonic cleaning device characterized by having a liquid port.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5723789U JPH0335U (en) | 1989-05-18 | 1989-05-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5723789U JPH0335U (en) | 1989-05-18 | 1989-05-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0335U true JPH0335U (en) | 1991-01-07 |
Family
ID=31581768
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5723789U Pending JPH0335U (en) | 1989-05-18 | 1989-05-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0335U (en) |
-
1989
- 1989-05-18 JP JP5723789U patent/JPH0335U/ja active Pending
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