JPH0245632U - - Google Patents
Info
- Publication number
- JPH0245632U JPH0245632U JP12486888U JP12486888U JPH0245632U JP H0245632 U JPH0245632 U JP H0245632U JP 12486888 U JP12486888 U JP 12486888U JP 12486888 U JP12486888 U JP 12486888U JP H0245632 U JPH0245632 U JP H0245632U
- Authority
- JP
- Japan
- Prior art keywords
- cleaning
- cleaning brush
- nozzle
- cleaned
- brush
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 8
- 239000007788 liquid Substances 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Cleaning In General (AREA)
Description
第１図は本考案の一実施例を示す構成図、第２
図は同斜視図、第３図は従来装置を示す構成図、
第４図は同斜視図である。
１……基体、２……ウエハ、３……スピンモー
タ、４……ノズル、５……ウエハ洗浄ブラシ、６
……モータ、７……アーム、８……配管。
Fig. 1 is a configuration diagram showing one embodiment of the present invention;
The figure is a perspective view of the same, and Figure 3 is a configuration diagram showing a conventional device.
FIG. 4 is a perspective view of the same. DESCRIPTION OF SYMBOLS 1...Base body, 2...Wafer, 3...Spin motor, 4...Nozzle, 5...Wafer cleaning brush, 6
...Motor, 7...Arm, 8...Piping.
Claims (1)
洗浄物と前記洗浄用ブラシの間に純水等の洗浄液
を注入するノズルとを有し、前記ノズルを前記洗
浄用ブラシの内部に設けたことを特徴とする洗浄
装置。 The cleaning brush has a cleaning brush for cleaning the plate surface of the object to be cleaned, and a nozzle for injecting a cleaning liquid such as pure water between the object to be cleaned and the cleaning brush, and the nozzle is provided inside the cleaning brush. A cleaning device characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12486888U JPH0245632U (en) | 1988-09-24 | 1988-09-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12486888U JPH0245632U (en) | 1988-09-24 | 1988-09-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0245632U true JPH0245632U (en) | 1990-03-29 |
Family
ID=31374969
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12486888U Pending JPH0245632U (en) | 1988-09-24 | 1988-09-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0245632U (en) |
-
1988
- 1988-09-24 JP JP12486888U patent/JPH0245632U/ja active Pending