JPH0247031U - - Google Patents
Info
- Publication number
- JPH0247031U JPH0247031U JP12587288U JP12587288U JPH0247031U JP H0247031 U JPH0247031 U JP H0247031U JP 12587288 U JP12587288 U JP 12587288U JP 12587288 U JP12587288 U JP 12587288U JP H0247031 U JPH0247031 U JP H0247031U
- Authority
- JP
- Japan
- Prior art keywords
- photomask
- reticle
- cleaning
- chemical solution
- scrub
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 5
- 238000005201 scrubbing Methods 0.000 claims 2
- 239000000126 substance Substances 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
Description
第１図は本考案の一実施例の縦断面図、第２図
は本考案の他の実施例の縦断面図、第３図は従来
のブラシ洗浄機の縦断面図である。
１……レチクル（又はフオトマスク）、２，１
２……ブラシ、３……洗浄槽、４……オーバーフ
ロー槽、５……レチクル保持アーム、６……ノズ
ル、７……シヤワー、８……排液口。
FIG. 1 is a vertical cross-sectional view of one embodiment of the present invention, FIG. 2 is a vertical cross-sectional view of another embodiment of the present invention, and FIG. 3 is a vertical cross-sectional view of a conventional brush washer. 1...Reticle (or photomask), 2,1
2... Brush, 3... Cleaning tank, 4... Overflow tank, 5... Reticle holding arm, 6... Nozzle, 7... Shower, 8... Drain port.
Claims (1)
に薬液を供給しながらブラシ及びスポンジにより
スクラブ機構を用いてスクラブ洗浄するフオトマ
スク・レチクル洗浄機において、薬液を浸たした
洗浄槽中にスクラブ機構を設け、薬液中でスクラ
ブ洗浄することを特徴とするフオトマスク・レチ
クル洗浄機。 In a photomask/reticle cleaning machine that uses a scrubbing mechanism with a brush and sponge to scrub the surface of a photomask or reticle for semiconductor manufacturing while supplying a chemical solution to the surface, the scrubbing mechanism is installed in a cleaning tank immersed in the chemical solution. A photomask/reticle cleaning machine that performs scrub cleaning.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12587288U JPH0247031U (en) | 1988-09-26 | 1988-09-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12587288U JPH0247031U (en) | 1988-09-26 | 1988-09-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0247031U true JPH0247031U (en) | 1990-03-30 |
Family
ID=31376862
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12587288U Pending JPH0247031U (en) | 1988-09-26 | 1988-09-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0247031U (en) |
-
1988
- 1988-09-26 JP JP12587288U patent/JPH0247031U/ja active Pending