JPH0246861U - - Google Patents
Info
- Publication number
- JPH0246861U JPH0246861U JP12486488U JP12486488U JPH0246861U JP H0246861 U JPH0246861 U JP H0246861U JP 12486488 U JP12486488 U JP 12486488U JP 12486488 U JP12486488 U JP 12486488U JP H0246861 U JPH0246861 U JP H0246861U
- Authority
- JP
- Japan
- Prior art keywords
- plating
- small inner
- inner tanks
- utility
- registration request
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007747 plating Methods 0.000 claims description 5
- 239000007788 liquid Substances 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 3
- 238000004080 punching Methods 0.000 description 1
Landscapes
- Chemically Coating (AREA)
- Electroplating Methods And Accessories (AREA)
Description
第１図は本考案の実施例１を示す構成図、第２
図は本考案の実施例２を示す構成図、第３図は従
来例を示す構成図である。
１……半導体基板、２……小型内槽、３……外
槽、４……メツキ液、５……パンチング板、６…
…噴出口、７……流量計、８……循環ポンプ。
Fig. 1 is a configuration diagram showing the first embodiment of the present invention;
The figure is a block diagram showing a second embodiment of the present invention, and FIG. 3 is a block diagram showing a conventional example. 1... Semiconductor substrate, 2... Small inner tank, 3... Outer tank, 4... Plating liquid, 5... Punching plate, 6...
...Spout port, 7...Flow meter, 8...Circulation pump.
Claims (1)
、一枚処理用小型内槽の複数基をメツキ槽内に設
け、かつ、該小型内槽にメツキ液を供給する機構
を装備したことを特徴とするメツキ装置。 A plating device for plating semiconductor substrates, characterized in that the plating tank is provided with a plurality of small inner tanks for single-wafer processing, and is equipped with a mechanism for supplying plating liquid to the small inner tanks. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12486488U JPH0246861U (en) | 1988-09-24 | 1988-09-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12486488U JPH0246861U (en) | 1988-09-24 | 1988-09-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0246861U true JPH0246861U (en) | 1990-03-30 |
Family
ID=31374961
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12486488U Pending JPH0246861U (en) | 1988-09-24 | 1988-09-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0246861U (en) |
-
1988
- 1988-09-24 JP JP12486488U patent/JPH0246861U/ja active Pending
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