JPS6239822B2 - - Google Patents

Info

Publication number
JPS6239822B2
JPS6239822B2 JP56185952A JP18595281A JPS6239822B2 JP S6239822 B2 JPS6239822 B2 JP S6239822B2 JP 56185952 A JP56185952 A JP 56185952A JP 18595281 A JP18595281 A JP 18595281A JP S6239822 B2 JPS6239822 B2 JP S6239822B2
Authority
JP
Japan
Prior art keywords
wafer
chuck table
pattern
sample chuck
chip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56185952A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5886739A (ja
Inventor
Tooru Araki
Akio Yokoyama
Makoto Sugawara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP56185952A priority Critical patent/JPS5886739A/ja
Publication of JPS5886739A publication Critical patent/JPS5886739A/ja
Publication of JPS6239822B2 publication Critical patent/JPS6239822B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P72/53—

Landscapes

  • Control Of Position Or Direction (AREA)
JP56185952A 1981-11-19 1981-11-19 ウエハの自動位置決め方法 Granted JPS5886739A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56185952A JPS5886739A (ja) 1981-11-19 1981-11-19 ウエハの自動位置決め方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56185952A JPS5886739A (ja) 1981-11-19 1981-11-19 ウエハの自動位置決め方法

Publications (2)

Publication Number Publication Date
JPS5886739A JPS5886739A (ja) 1983-05-24
JPS6239822B2 true JPS6239822B2 (OSRAM) 1987-08-25

Family

ID=16179743

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56185952A Granted JPS5886739A (ja) 1981-11-19 1981-11-19 ウエハの自動位置決め方法

Country Status (1)

Country Link
JP (1) JPS5886739A (OSRAM)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2560002B2 (ja) * 1984-06-23 1996-12-04 東京エレクトロン 株式会社 ウエハプロ−バ
JPH0619670B2 (ja) * 1984-12-17 1994-03-16 株式会社デイスコ 自動精密位置合せシステム
JPS61235714A (ja) * 1985-04-11 1986-10-21 Nippon Kogaku Kk <Nikon> ワ−ク座標系による駆動装置
JPH0652755B2 (ja) * 1986-04-01 1994-07-06 キヤノン株式会社 位置合せ方法

Also Published As

Publication number Publication date
JPS5886739A (ja) 1983-05-24

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