JPS623804Y2 - - Google Patents
Info
- Publication number
- JPS623804Y2 JPS623804Y2 JP1981129797U JP12979781U JPS623804Y2 JP S623804 Y2 JPS623804 Y2 JP S623804Y2 JP 1981129797 U JP1981129797 U JP 1981129797U JP 12979781 U JP12979781 U JP 12979781U JP S623804 Y2 JPS623804 Y2 JP S623804Y2
- Authority
- JP
- Japan
- Prior art keywords
- mask
- inert gas
- exposure
- exposure mask
- nozzle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000011261 inert gas Substances 0.000 claims description 9
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims description 2
- 101100269850 Caenorhabditis elegans mask-1 gene Proteins 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1981129797U JPS5836738U (ja) | 1981-08-31 | 1981-08-31 | 露光用マスク装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1981129797U JPS5836738U (ja) | 1981-08-31 | 1981-08-31 | 露光用マスク装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5836738U JPS5836738U (ja) | 1983-03-10 |
JPS623804Y2 true JPS623804Y2 (zh) | 1987-01-28 |
Family
ID=29923459
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1981129797U Granted JPS5836738U (ja) | 1981-08-31 | 1981-08-31 | 露光用マスク装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5836738U (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101930181A (zh) * | 2009-06-17 | 2010-12-29 | 株式会社日立高科技 | 接近式曝光装置、基板温度控制方法及面板基板制造方法 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5533227B2 (ja) * | 2010-05-13 | 2014-06-25 | 凸版印刷株式会社 | 露光装置 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5368981A (en) * | 1976-12-02 | 1978-06-19 | Mitsubishi Electric Corp | Vacuum contact printing apparatus |
-
1981
- 1981-08-31 JP JP1981129797U patent/JPS5836738U/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5368981A (en) * | 1976-12-02 | 1978-06-19 | Mitsubishi Electric Corp | Vacuum contact printing apparatus |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101930181A (zh) * | 2009-06-17 | 2010-12-29 | 株式会社日立高科技 | 接近式曝光装置、基板温度控制方法及面板基板制造方法 |
Also Published As
Publication number | Publication date |
---|---|
JPS5836738U (ja) | 1983-03-10 |
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