JPS623804Y2 - - Google Patents

Info

Publication number
JPS623804Y2
JPS623804Y2 JP1981129797U JP12979781U JPS623804Y2 JP S623804 Y2 JPS623804 Y2 JP S623804Y2 JP 1981129797 U JP1981129797 U JP 1981129797U JP 12979781 U JP12979781 U JP 12979781U JP S623804 Y2 JPS623804 Y2 JP S623804Y2
Authority
JP
Japan
Prior art keywords
mask
inert gas
exposure
exposure mask
nozzle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1981129797U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5836738U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1981129797U priority Critical patent/JPS5836738U/ja
Publication of JPS5836738U publication Critical patent/JPS5836738U/ja
Application granted granted Critical
Publication of JPS623804Y2 publication Critical patent/JPS623804Y2/ja
Granted legal-status Critical Current

Links

JP1981129797U 1981-08-31 1981-08-31 露光用マスク装置 Granted JPS5836738U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1981129797U JPS5836738U (ja) 1981-08-31 1981-08-31 露光用マスク装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1981129797U JPS5836738U (ja) 1981-08-31 1981-08-31 露光用マスク装置

Publications (2)

Publication Number Publication Date
JPS5836738U JPS5836738U (ja) 1983-03-10
JPS623804Y2 true JPS623804Y2 (enrdf_load_html_response) 1987-01-28

Family

ID=29923459

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1981129797U Granted JPS5836738U (ja) 1981-08-31 1981-08-31 露光用マスク装置

Country Status (1)

Country Link
JP (1) JPS5836738U (enrdf_load_html_response)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101930181A (zh) * 2009-06-17 2010-12-29 株式会社日立高科技 接近式曝光装置、基板温度控制方法及面板基板制造方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5533227B2 (ja) * 2010-05-13 2014-06-25 凸版印刷株式会社 露光装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5368981A (en) * 1976-12-02 1978-06-19 Mitsubishi Electric Corp Vacuum contact printing apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101930181A (zh) * 2009-06-17 2010-12-29 株式会社日立高科技 接近式曝光装置、基板温度控制方法及面板基板制造方法
CN101930181B (zh) 2009-06-17 2012-11-07 株式会社日立高科技 接近式曝光装置、基板温度控制方法及面板基板制造方法

Also Published As

Publication number Publication date
JPS5836738U (ja) 1983-03-10

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