JPS6234147B2 - - Google Patents

Info

Publication number
JPS6234147B2
JPS6234147B2 JP54148903A JP14890379A JPS6234147B2 JP S6234147 B2 JPS6234147 B2 JP S6234147B2 JP 54148903 A JP54148903 A JP 54148903A JP 14890379 A JP14890379 A JP 14890379A JP S6234147 B2 JPS6234147 B2 JP S6234147B2
Authority
JP
Japan
Prior art keywords
film
oxide film
substrate
polycrystalline silicon
groove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54148903A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5671950A (en
Inventor
Yoichi Tamaoki
Hisayuki Higuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP14890379A priority Critical patent/JPS5671950A/ja
Publication of JPS5671950A publication Critical patent/JPS5671950A/ja
Publication of JPS6234147B2 publication Critical patent/JPS6234147B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W10/019—
    • H10W10/10—

Landscapes

  • Local Oxidation Of Silicon (AREA)
  • Element Separation (AREA)
JP14890379A 1979-11-19 1979-11-19 Manufacture of integrated semiconductor circuit Granted JPS5671950A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14890379A JPS5671950A (en) 1979-11-19 1979-11-19 Manufacture of integrated semiconductor circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14890379A JPS5671950A (en) 1979-11-19 1979-11-19 Manufacture of integrated semiconductor circuit

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP9811088A Division JPS63288044A (ja) 1988-04-22 1988-04-22 半導体装置

Publications (2)

Publication Number Publication Date
JPS5671950A JPS5671950A (en) 1981-06-15
JPS6234147B2 true JPS6234147B2 (index.php) 1987-07-24

Family

ID=15463240

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14890379A Granted JPS5671950A (en) 1979-11-19 1979-11-19 Manufacture of integrated semiconductor circuit

Country Status (1)

Country Link
JP (1) JPS5671950A (index.php)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3677455D1 (de) * 1985-09-30 1991-03-14 Siemens Ag Verfahren zur begrenzung von ausbruechen beim saegen einer halbleiterscheibe.

Also Published As

Publication number Publication date
JPS5671950A (en) 1981-06-15

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