JPS6359538B2 - - Google Patents

Info

Publication number
JPS6359538B2
JPS6359538B2 JP56142383A JP14238381A JPS6359538B2 JP S6359538 B2 JPS6359538 B2 JP S6359538B2 JP 56142383 A JP56142383 A JP 56142383A JP 14238381 A JP14238381 A JP 14238381A JP S6359538 B2 JPS6359538 B2 JP S6359538B2
Authority
JP
Japan
Prior art keywords
film
groove
polysilicon
semiconductor device
sio
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56142383A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5844735A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP56142383A priority Critical patent/JPS5844735A/ja
Publication of JPS5844735A publication Critical patent/JPS5844735A/ja
Publication of JPS6359538B2 publication Critical patent/JPS6359538B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W10/041—
    • H10W10/40—

Landscapes

  • Local Oxidation Of Silicon (AREA)
  • Element Separation (AREA)
JP56142383A 1981-09-11 1981-09-11 半導体装置の製造方法 Granted JPS5844735A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56142383A JPS5844735A (ja) 1981-09-11 1981-09-11 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56142383A JPS5844735A (ja) 1981-09-11 1981-09-11 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS5844735A JPS5844735A (ja) 1983-03-15
JPS6359538B2 true JPS6359538B2 (index.php) 1988-11-21

Family

ID=15314082

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56142383A Granted JPS5844735A (ja) 1981-09-11 1981-09-11 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS5844735A (index.php)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59119848A (ja) * 1982-12-27 1984-07-11 Fujitsu Ltd 半導体装置の製造方法
GB2200794A (en) * 1986-11-19 1988-08-10 Plessey Co Plc Semiconductor device manufacture
KR100256813B1 (ko) * 1993-12-28 2000-05-15 김영환 반도체소자의 소자분리방법
JP2891205B2 (ja) * 1996-10-21 1999-05-17 日本電気株式会社 半導体集積回路の製造方法
US7754550B2 (en) * 2003-07-10 2010-07-13 International Rectifier Corporation Process for forming thick oxides on Si or SiC for semiconductor devices

Also Published As

Publication number Publication date
JPS5844735A (ja) 1983-03-15

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