JPS6359539B2 - - Google Patents

Info

Publication number
JPS6359539B2
JPS6359539B2 JP56146088A JP14608881A JPS6359539B2 JP S6359539 B2 JPS6359539 B2 JP S6359539B2 JP 56146088 A JP56146088 A JP 56146088A JP 14608881 A JP14608881 A JP 14608881A JP S6359539 B2 JPS6359539 B2 JP S6359539B2
Authority
JP
Japan
Prior art keywords
film
groove
silicon
polycrystalline silicon
oxide film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56146088A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5848436A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP56146088A priority Critical patent/JPS5848436A/ja
Publication of JPS5848436A publication Critical patent/JPS5848436A/ja
Publication of JPS6359539B2 publication Critical patent/JPS6359539B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W10/019—
    • H10W10/10—

Landscapes

  • Local Oxidation Of Silicon (AREA)
  • Element Separation (AREA)
JP56146088A 1981-09-18 1981-09-18 半導体装置の製造方法 Granted JPS5848436A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56146088A JPS5848436A (ja) 1981-09-18 1981-09-18 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56146088A JPS5848436A (ja) 1981-09-18 1981-09-18 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS5848436A JPS5848436A (ja) 1983-03-22
JPS6359539B2 true JPS6359539B2 (index.php) 1988-11-21

Family

ID=15399852

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56146088A Granted JPS5848436A (ja) 1981-09-18 1981-09-18 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS5848436A (index.php)

Also Published As

Publication number Publication date
JPS5848436A (ja) 1983-03-22

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