JPS6230697B2 - - Google Patents

Info

Publication number
JPS6230697B2
JPS6230697B2 JP55176212A JP17621280A JPS6230697B2 JP S6230697 B2 JPS6230697 B2 JP S6230697B2 JP 55176212 A JP55176212 A JP 55176212A JP 17621280 A JP17621280 A JP 17621280A JP S6230697 B2 JPS6230697 B2 JP S6230697B2
Authority
JP
Japan
Prior art keywords
insulating film
metal wiring
wiring body
forming
polyimide resin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55176212A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5799756A (en
Inventor
Shigeru Komatsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP17621280A priority Critical patent/JPS5799756A/ja
Publication of JPS5799756A publication Critical patent/JPS5799756A/ja
Publication of JPS6230697B2 publication Critical patent/JPS6230697B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP17621280A 1980-12-13 1980-12-13 Semiconductor device and its manufacture Granted JPS5799756A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17621280A JPS5799756A (en) 1980-12-13 1980-12-13 Semiconductor device and its manufacture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17621280A JPS5799756A (en) 1980-12-13 1980-12-13 Semiconductor device and its manufacture

Publications (2)

Publication Number Publication Date
JPS5799756A JPS5799756A (en) 1982-06-21
JPS6230697B2 true JPS6230697B2 (enrdf_load_stackoverflow) 1987-07-03

Family

ID=16009578

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17621280A Granted JPS5799756A (en) 1980-12-13 1980-12-13 Semiconductor device and its manufacture

Country Status (1)

Country Link
JP (1) JPS5799756A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01235254A (ja) * 1988-03-15 1989-09-20 Nec Corp 半導体装置及びその製造方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5034181A (enrdf_load_stackoverflow) * 1973-07-30 1975-04-02
JPS5179573A (ja) * 1975-01-06 1976-07-10 Hitachi Ltd Haisensonohogohoho
JPS5845819B2 (ja) * 1976-07-28 1983-10-12 株式会社日立製作所 多層配線構造

Also Published As

Publication number Publication date
JPS5799756A (en) 1982-06-21

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